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本文报导了横向放电泵浦高气压KrCl准分子激光器的实验结果。使用HCl:Kr:He=2.5:160:1500混合气体
总气压2~2.5atm
在14cm
3
激活区中获得输出6mJ、体能密度0.4J/l、电效率0.12%。使用NF3:Ar:He=2.7:270:1500混合气体时
观测到ArF激光输出。
The experimental results of the high pressure KrCl Excimer laser pumped by transverse discharge are reported. The gas mixture used is HCl:Kr:He = 2.5:160:1500 and the total pressure varies from 2 atm. to 2.5 atm. The maximum Output energy is 6mJ in a 14cm3 volume. The specific energy density is 0.4J/1. The electric efficiency is 0.12%. In this device
the ArF laser action is observed too
in NF3:Ar:He = 2.7:270:1500 gas mixture at a total pressure of about 2 atm. .
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