Study on the Silicon Based Blocked-Impurity-Band Terahertz Detector and Its Application for Imaging

WANG Bing-bing; WANG Xiao-dong; CHEN Yu-lu; ZHANG Chuan-sheng; ZANG Yuan-zang; PAN Ming; CAO Jun-cheng

doi:10.12263/DZXB.20190791

您当前的位置：

首页 >

文章列表页 >

Study on the Silicon Based Blocked-Impurity-Band Terahertz Detector and Its Application for Imaging

CORRESPONDENCE | 更新时间：2025-12-08

- Study on the Silicon Based Blocked-Impurity-Band Terahertz Detector and Its Application for Imaging
- ACTA ELECTRONICA SINICA Vol. 49, Issue 9, Pages: 1867-1872(2021)
- 作者机构：
  
  1.中国科学院上海微系统与信息技术研究所中国科学院太赫兹固态技术重点实验室，上海 200050
  2.中国科学院大学材料与光电研究中心，北京 100049
  3.中国电子科技集团公司第五十研究所，上海 200331
- 作者简介：
- 基金信息：
- DOI：10.12263/DZXB.20190791
  CLC： O471.5
- Received：10 July 2019，
  
  Revised：2021-03-03，
  
  Published：25 September 2021
- 稿件说明：
移动端阅览
王兵兵,王晓东,陈雨璐等.硅基阻挡杂质带太赫兹探测器及其成像研究[J].电子学报,2021,49(09):1867-1872.

WANG Bing-bing,WANG Xiao-dong,CHEN Yu-lu,et al.Study on the Silicon Based Blocked-Impurity-Band Terahertz Detector and Its Application for Imaging[J].ACTA ELECTRONICA SINICA,2021,49(09):1867-1872.
王兵兵,王晓东,陈雨璐等.硅基阻挡杂质带太赫兹探测器及其成像研究[J].电子学报,2021,49(09):1867-1872. DOI： 10.12263/DZXB.20190791.

WANG Bing-bing,WANG Xiao-dong,CHEN Yu-lu,et al.Study on the Silicon Based Blocked-Impurity-Band Terahertz Detector and Its Application for Imaging[J].ACTA ELECTRONICA SINICA,2021,49(09):1867-1872. DOI： 10.12263/DZXB.20190791.

摘要

太赫兹探测及成像技术是推动太赫兹科学技术发展的基础和关键.为了实现高灵敏太赫兹探测及成像，设计了一种台面型硅基阻挡杂质带太赫兹探测器，详细介绍了其结构及探测机理，描述了其制备工艺流程，并搭建了黑体响应测试系统.结果表明，4.2K温度条件下，3.8V工作偏压时，探测器峰值响应率可达55A/W，响应频段覆盖6.7~60THz.此外，搭建了一套两维扫描成像系统，实现了高分辨率被动成像.实验结果表明，成像系统空间分辨率可达400μm、温度分辨率约为7.5mK.

Abstract

Terahertz detection and imaging technology are the foundation and key to promote terahertz technology development. In order to realize high sensitivity terahertz detection and imaging

a mesa-type silicon-based blocked-impurity-band (BIB) terahertz detector is designed. The structure and detection mechanism of the detector are introduced in detail. The preparation processes are presented briefly. A series of its photoelectric performances are investigated. A blackbody responsivity test system is built. The results show that at 4.2K temperature and 3.8V bias

its peak responsivity reaches 55A/W

and the response spectrum covers the frequency range from 6.7~60THz. In addition

a scan imaging system is set

and the high-resolution passive imaging is achieved. The imaging result shows that the spatial resolution and the temperature resolution of the imaging system can reach about 400μm and 7.5mK

respectively.

关键词

Keywords

references

Siegel P H . Terahertz technology [J]. IEEE Transactions on Microwave Theory and Techniques , 2002 , 50 ( 3 ): 910 - 928 .

陈龙超 , 范文慧 . 高灵敏度低噪声太赫兹电光探测器研究 [J]. 电子学报 , 2012 , 40 ( 9 ): 1705 - 1709 .

Chen L C , Fan W H . Study on high sensitivity and low noise electro-optic terahertz detector [J]. Acta Electronica Sinica , 2012 , 40 ( 9 ): 1705 - 1709 . (in Chinese)

廖复疆 . 微型真空电子器件和太赫兹辐射源技术进展 [J]. 电子学报 , 2003 , 31 ( 9 ): 1361 - 1364 .

Liao F J . Micro-vacuum electron devices and terahertz vacuum sources [J]. Acta Electronica Sinica , 2003 , 31 ( 9 ): 1361 - 1364 . (in Chinese)

Manohara H M , Wong E W , Schlecht E , et al . Carbon nanotube Schottky diodes using Ti-Schottky and Pt-Ohmic contacts for high frequency applications [J]. Nano Letters , 2005 , 5 ( 7 ): 1469 - 1474 .

姚常飞 , 周明 , 罗运生 , 等 . 基于肖特基势垒二极管的太赫兹固态倍频源和检测器研制 [J]. 电子学报 , 2013 , 41 ( 3 ): 438 - 443 .

Yao C F , Zhou M , Luo Y S , et al . Development of terahertz frequency solid state multiply sources and sensors with Schottky barrier diodes [J]. Acta Electronica Sinica , 2013 , 41 ( 3 ): 438 - 443 . (in Chinese)

Glaab D , Boppel S , Lisauskas A , et al . Terahertz heterodyne detection with silicon field-effect transistors [J]. Applied Physics Letters , 2010 , 96 ( 4 ): 042106 .

Tauk R , Teppe F , Boubanga S , et al . Plasma wave detection of terahertz radiation by silicon field effects transistors: Responsivity and noise equivalent power [J]. Applied Physics Letters , 2006 , 89 ( 25 ): 253511 .

Nakagawa Y , Yoshinaga H . Characteristics of high-sensitivity Ge bolometer [J]. Japanese Journal of Applied Physics , 1970 , 9 ( 1 ): 125 - 131 .

Gu L L , Guo X G , Fu Z L , et al . Optical-phonon-mediated photocurrent in terahertz quantum-well photodetectors [J]. Applied Physics Letters , 2015 , 106 ( 11 ): 111107 .

Sakon I , Ikeda Y , Fujishiro N , et al . Conceptual design for the mid-infrared medium-resolution Echelle spectrometer (MIRMES) on the SPICA Mission [A]. Space Telescopes and Instrumentation 2010: Optical , Infrared, and Millimeter Wave[C] . San Diego, California, USA : SPIE , 2010 . 77310Q-1 - 77310Q-10.

Petroff M D , Stapelbroek M G . Blocked impurity band detectors [S]. US Patent : 4568960 , 1986-02-04 .

Wang X D , Wang B B , Chen Y L , et al . Spectral response characteristics of novel ion-implanted planar GaAs blocked-impurity-band detectors in the terahertz domain [J]. Optical and Quantum Electronics , 2016 , 48 ( 11 ): 1 - 10 .

廖开升 , 刘希辉 , 黄亮 , 等 . 天文用阻挡杂质带红外探测器 [J]. 中国科学: 物理学力学天文学 , 2014 , 44 ( 4 ): 360 - 367 .

Liao K S , Liu X H , Huang L , et al . Blocked impurity band infrared detector for astronomy [J]. Scientia Sinica (Physica,Mechanica & Astronomica) , 2014 , 44 ( 4 ): 360 - 367 . (in Chinese)

Haegel N M . BIB detector development for the far infrared: From Ge to GaAs [A]. Quantum Sensing: Evolution and Revolution from Past to Future [C]. San Jose, CA, USA : SPIE , 2003 . 182 - 194 .

Ando K J , Hoffman A W , Love P J , et al . Development of Si: As impurity band conduction (IBC) detectors for mid-infrared applications [A]. Infrared Technology and Applications [C]. Orlando, Florida, USA : SPIE , 2003 . 648 - 657 .

Reichertz L A , Cardozo B L , Beeman J W , et al . First results on GaAs blocked impurity band (BIB) structures for far-infrared detector arrays [A]. Infrared Spaceborne Remote Sensing [C]. San Diego, California, USA : SPIE , 2005 . 58830Q-1 - 58830Q-8.

Gulkis S , Lubin P M , Meyer S S , et al . The cosmic background explorer [J]. Scientific American , 1990 , 262 ( 1 ): 132 - 139 .

Wolf J , Wiest L , Groezinger U , et al . Si: As blocked-impurity-band detectors for ISO′s photometer [A]. Infrared Spaceborne Remote Sensing Ш [C]. San Diego, CA, USA : SPIE , 1995 . 482 - 488 .

Werner M W . The spitzer space telescope mission [J]. Advances in Space Research , 2005 , 36 ( 6 ): 1048 - 1049 .

刘恩科 . 半导体物理学 [M]. 7版 . 北京 : 电子工业出版社 , 2016 .

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Neighborhood Definition for Catadioptric Omnidirectional Image Based on Resolution of Position

Statistical Feature Based Fast Color Image Interpolation

Algorithm on Extracting High-Resolution Image from Low-Resolution Image Sequence

Research on High Resolution Hyperspectral Capture Technique

Related Author

ZHANG Mao-jun

LIN Gao-peng

TAN Shu-ren

HE Feng

LIN Ling

ZHANG Li-jun

LI Gang

WANG Jin

Related Institution

College of Information Systems and Management, National University of Defense Technology

Biomedical Signal Detecting and Processing Laboratory,Tianjin University

Institute of Image Processing and Pattern Recognition,Shanghai JiaoTong University

IBM China Research Laboratory

Dept. of Electronic Engineering,Fudan University

⁰