A Review on MEMS/NEMS-Based Biosensor

李杜娟; 陈慧旖; 刘超然; 樊凯; 王高峰

doi:10.12263/DZXB.20200266

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A Review on MEMS/NEMS-Based Biosensor

更新时间：2025-12-08

- A Review on MEMS/NEMS-Based Biosensor
- Acta Electronica Sinica Vol. 49, Issue 6, Pages: 1228-1236(2021)
- 作者机构：
- 作者简介：
- 基金信息：
  
  National Key Research and Development Program of China Intergovernmental Cooperation in International Science and Technology Innovation Major Project (No.2018YFE0120000);Key Research and Development Project of Zhejiang Province (No.2019C04003);Youth Fund of National Natural Science Foundation of China (No.61804038);Public Welfare Technology Research Program/Social Development (No.LGF18H1800052018)
- DOI：10.12263/DZXB.20200266
  CLC： TQ150
- Published：2021
- 稿件说明：
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李杜娟, 陈慧旖, 刘超然, et al. A Review on MEMS/NEMS-Based Biosensor[J]. Acta Electronica Sinica, 2021, 49(6): 1228-1236.
DOI：

李杜娟, 陈慧旖, 刘超然, et al. A Review on MEMS/NEMS-Based Biosensor[J]. Acta Electronica Sinica, 2021, 49(6): 1228-1236. DOI： 10.12263/DZXB.20200266.

摘要

微/纳电子机械系统MEMS/NEMS（Micro/Nano Electro-Mechanical Systems）技术作为一种成熟的微结构制造技术，可实现硅基纳米级传感器器件的批量化、集成化制造，形成具有体积小、质量轻、性能高的微型传感器及其测试系统.生物传感技术可以将生物敏感反应信号转化为光电等信号而被检测.与其他生物传感器相比，采用MEMS/NEMS技术制备的生物传感器，灵敏度更高、响应时间更短、检测性能更强，更为实现自动化高通量的医学诊断提供了有力的支持.本文着重探讨MEMS/NEMS生物传感器常见的器件类型和对应器件的制备工艺、材料、传感机理、分类及其传感局限，通过综述MEMS/NEMS生物传感器及其国内外研究进展，最后总结MEMS/NEMS生物传感器关键的技术难点与重点，并展望未来MEMS/NEMS生物传感技术的发展前景以及存在的挑战.

Abstract

MEMS/NEMS (Micro/Nano Electro-Mechanical Systems) technology

as a mature microstructure manufacturing technology

can realize the mass production and integration of silicon-based nano-scale sensor devices. Moreover

it's easy to achieve small

light

and high performance miniature sensor and its test system. Biosensing technology can transform biological reaction signals into photoelectric signals. Compared with other biosensors

MEMS/NEMS-based biosensors have higher sensitivity

shorter response time

and stronger detection performance

which provide powerful support for automated high-throughput medical diagnosis. This paper focuses on the common device types of MEMS/NEMS-based biosensors and their manufacturing technology

materials

sensing mechanism

classification

and sensing limitation. By reviewing MEMS/NEMS biosensors and their research progress

the key technical difficulties and priorities of MEMS/NEMS biosensor are summarized. Finally

we discuss the future development prospects and existing challenges of MEMS/NEMS-based biological sensing technology.

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