

浏览全部资源
扫码关注微信
1. 电子科技大学电子薄膜与集成器件国家重点实验室,四川,成都,610054
2. 中国电科第二十四研究所,重庆,400060
3. 电子科技大学电子薄膜与集成器件国家重点实验室,四川,成都,610054
4. 中国电科第二十四研究所,重庆,400060
Published:2021
移动端阅览
WU Ke-jun, LI Ze-peng, ZHANG Ning, et al. Design and Fabrication of a Low Operating Voltage Gate-controlled Silicon Light-Emitting Device in Standard CMOS Process[J]. Acta Electronica Sinica, 2021, 49(5): 1013-1018.
WU Ke-jun, LI Ze-peng, ZHANG Ning, et al. Design and Fabrication of a Low Operating Voltage Gate-controlled Silicon Light-Emitting Device in Standard CMOS Process[J]. Acta Electronica Sinica, 2021, 49(5): 1013-1018. DOI: 10.12263/DZXB.20200522.
本文采用0.18μm标准CMOS工艺设计并制备了一种MOS结构的低压栅控硅基发光器件.该光源器件内部采用n
+
-p
+
-p
+
-n
+
-p
+
-p
+
-n
+
的叉指结构
在相邻两个p
+
有源区之间覆盖多晶硅栅作为第三端控制电极
用于在源/漏区边缘形成场诱导结
降低p
+
/n-well结的反向击穿电压
提高器件发光功率.测试结果表明
该光源器件可以发射420nm~780nm的黄色可见光
在3V的正向栅压下
p
+
/n-well发光二极管的反向击穿电压下降到3V以下
光输出功率提高至2倍以上.本文设计的光源器件工作电压较低
并且与CMOS工艺完全兼容
可以与其他CMOS电路共用电源并且实现单片集成
在硅基光电子集成领域具有一定的应用价值.
A MOS-like low operating voltage gate-controlled silicon-based light-emitting device is designed and fabricated using 0.18μm standard CMOS technology. The light emitting device adapts a n
+
-p
+
-p
+
-n
+
-p
+
-p
+
-n
+
interdigital structure
in which a poly-Si gate between two adjacent p
+
regions working as a third-terminal control electrode was designed. The poly-Si gate is used to produce field-induced junctions at the edge of source/drain region
so as to decrease the breakdown v
oltage of p
+
/n-well junction and increase optical power of the device. The measured results indicate that the device can emit yellow visible light with wavelength from 420nm to 780nm. Under forward gate voltage of 3V
the breakdown voltage of p
+
/n-well junction can be reduced to below 3V
and the optical power can be increased to more than twice. Because of its low operating voltage and full compatibility with CMOS technology
the device can be integrated with other CMOS circuits by using a single power supply
which has certain applications in the field of silicon-based optoelectronic integration.
0
Views
4
下载量
0
CSCD
Publicity Resources
Related Articles
Related Author
Related Institution
京公网安备11010802024621