The Study and Application of Terahertz Waveguide Package

LIU Jun; YU Wei-hua; LÜ Xin

doi:10.12263/DZXB.20210305

您当前的位置：

首页 >

文章列表页 >

The Study and Application of Terahertz Waveguide Package

PAPERS | 更新时间：2025-12-08

- The Study and Application of Terahertz Waveguide Package
- ACTA ELECTRONICA SINICA Vol. 50, Issue 8, Pages: 1859-1865(2022)
- 作者机构：
  
  1.中国电子科技集团公司第五十四研究所北京研发中心,北京 100070
  2.北京理工大学毫米波与太赫兹技术北京市重点实验室,北京 100081
- 作者简介：
- 基金信息：
- DOI：10.12263/DZXB.20210305
  CLC： TN432
- Received：03 March 2021，
  
  Revised：2021-06-23，
  
  Published：25 August 2022
- 稿件说明：
移动端阅览
刘军,于伟华,吕昕.太赫兹波导封装技术的研究与应用[J].电子学报,2022,50(08):1859-1865.

LIU Jun,YU Wei-hua,LÜ Xin.The Study and Application of Terahertz Waveguide Package[J].ACTA ELECTRONICA SINICA,2022,50(08):1859-1865.
刘军,于伟华,吕昕.太赫兹波导封装技术的研究与应用[J].电子学报,2022,50(08):1859-1865. DOI： 10.12263/DZXB.20210305.

LIU Jun,YU Wei-hua,LÜ Xin.The Study and Application of Terahertz Waveguide Package[J].ACTA ELECTRONICA SINICA,2022,50(08):1859-1865. DOI： 10.12263/DZXB.20210305.

摘要

对太赫兹波导封装技术进行研究，并在D波段（110~170GHz）和220GHz频段分别进行设计验证.通过金丝键合技术对研制的D波段放大器芯片进行波导封装设计，封装测试结果为：封装模块在139GHz测试得到最大增益为10.8dB，在137~144GHz频率范围内，增益大于7.8dB，输入端回波损耗优于5dB，输出端回波损耗优于8.5dB.封装与在片测试结果曲线变化趋势基本一致，但是封装后芯片性能恶化严重，封装损耗大于5dB.基于此，开展太赫兹波导-集成探针过渡结构研究，提出一种适用于太赫兹频段的波导-集成探针过渡结构，并在220GHz频段进行设计验证.模块测试结果为：在208~233GHz频带范围内，插入损耗优于3dB，回波损耗优于8dB，在224GHz频点处，获得该结构的最优性能，其插入损耗为1.3dB，回波损耗为46.4dB.该波导-集成探针过渡结构为太赫兹频段全集成芯片研制提供了经验.

Abstract

Research on terahertz waveguide packaging technology and design verification in D-band (110~170GHz) and 220GHz band

respectively. Based on the wire bonding method

D-band LNA module is developed with self-designed amplifier chip. The module measurement shows the peak gain is 10.8dB at 139GHz，the gain higher than 7.8dB from 137GHz to 144GHz

the measured input return loss and output return loss are better than 5 dB and 8.5dB in operating frequencies

respectively. The tendency of packaged curve is same as the on-chip measured and its value is worse than the on-chip measurement about 5dB. A waveguide-to-integrated probe transition structure for terahertz band is proposed and verified in 220GHz. The module measurement shows the return loss is better than 8dB and the insertion loss is better than 3dB during 208GHz to 233GHz and the best performance is achieved at 224GHz with insertion loss is 1.3dB and return loss is 46.4dB. The waveguide-to-integrated probe transition structure provides experience for development of fully integrated terahertz chip.

关键词

Keywords

references

胡林林 , 曾造金 , 陈洪斌 , 等 . 毫米波/太赫兹扩展互作用速调管放大器的应用及研究进展 [J]. 电子学报 , 2019 , 47 ( 1 ): 211 ‐ 219 .

HU Lin-lin , ZENG Zao-jin , CHEN Hong-Bin , et al . Application and development of extended interaction klystrons in millimeter-wave and terahertz band [J]. Acta Electronica Sinica , 2019 , 47 ( 1 ): 211 ‐ 219 . (in Chinese)

姚常飞 , 周明 , 罗运生 , 等 . 基于肖特基势垒二极管的太赫兹固态倍频源和检测器研制 [J]. 电子学报 , 2013 , 41 ( 3 ): 438 ‐ 443 .

YAO Chang-fei , ZHOU Ming , LUO Yun-sheng , et al . Development of terahertz frequency solid state multiply sources and sensors with schottky barrier diodes [J]. Acta Electronica Sinica , 2013 , 41 ( 3 ): 438 ‐ 443 . (in Chinese)

刘松卓 , 于伟华 , 邓长江 , 等 . 面向通信系统的太赫兹调制技术进展现状 [J]. 无线电通信技术 , 2021 , 47 ( 1 ): 44 ‐ 50 .

LIU Song-zhuo , YU Wei-hua , DENG Chang-jiang , et al . Recent progress of research on terahertz signal modulation technology for communication systems [J]. Radio Communications Technology , 2021 , 47 ( 1 ): 44 ‐ 50 . (in Chinese)

HASSANIN A , SHAABAN A , EL-SAMIE F . Medical applications of image reconstruction using electromagnetic field in terahertz frequency range [C]// 2019 International Symposium on Networks, Computers and Communications(ISNCC) . Piscataway, NJ : IEEE , 2019 : 1 ‐ 4 .

张开春 . 太赫兹扩展互作用振荡器的矩形耦合腔特性研究 [J]. 电子学报 , 2011 , 39 ( 3 ): 632 ‐ 635 .

ZHANG Kai-chun . Study of characteristic of rectangular coupled-cavity slow-wave structure for extended interaction oscillator in terahertz band [J]. Acta Electronica Sinica , 2011 , 39 ( 3 ): 632 ‐ 635 . (in Chinese)

胡林林 , 蔡金赤 , 陈洪斌 . 太赫兹返波振荡器的应用及研究进展 [J]. 电子学报 , 2016 , 44 ( 4 ): 974 ‐ 982 .

HU Lin-lin , CAI Jin-chi , CHEN Hong-bin . Applications and development of terahertz backward wave oscillators [J]. Acta Electronica Sinica , 2016 , 44 ( 4 ): 974 ‐ 982 . (in Chinese)

吴振华 , 张开春 , 刘盛纲 . 折叠波导结构的THz振荡辐射源研究 [J]. 电子学报 , 2009 , 37 ( 12 ): 2677 ‐ 2680 .

WU Zhen-hua , ZHANG Kai-chun , LIU Sheng-gang . Research of THz folded waveguide oscillator radiation source [J]. Acta Electronica Sinica , 2009 , 37 ( 12 ): 2677 ‐ 2680 . (in Chinese)

DOCHEV D , Desmaris V , Meledin D , et al . A technology demonstrator for 1.6-2.0 THz waveguide HEB receiver with a novel mixer layout [J]. Journal of Infrared, Millimeter and Terahertz Waves , 2011 , 32 ( 4 ): 451 ‐ 465 .

MAESTRINI A , MEHDI I , SILES J V , et al . Design and characterization of a room temperature all-solid-state electronic source tunable from 2.48 to 2.75 THz [J]. IEEE Transactions on Terahertz Science and Technology , 2012 , 2 ( 2 ): 177 ‐ 185 .

KOSUGI T , HAMADA H , TAKAHASHI H , et al . 250-300 GHz waveguide module with ridge-coupler and InP-HEMTIC [C]// 2014 Asia-Pacific Microwave Conference (APMC) . Piscataway, NJ : IEEE , 2014 : 1133 ‐ 1135 .

URTEAGA M , SEO M , HACKER J , et al . InP HBT integrated circuit technology for terahertz frequencies [C]// 2010 IEEE Compound Semiconductor Integrated Circuit Symposium(CSICS) , Piscataway, NJ : IEEE , 2010 : 1 ‐ 4 .

LEONG K , DEAL W R , RADISIC V , et al . A 340-380 GHz integrated CB-CPW-to-waveguide transition for sub millimeter-wave MMIC packaging [J]. IEEE Microwave & Wireless Components Letters , 2009 , 19 ( 6 ): 413 ‐ 415 .

KANGASLAHTI P , SCHLECHT E , SAMOSKA L . Differential InP HEMT MMIC amplifiers embedded in waveguides [J]. Nasa Tech Briefs , 2009 , 33 ( 9 ): 35 ‐ 36 .

LIU Jun , LV Xin , YU Wei-hua , et al . Design and realization of D-band InP MMIC amplifier with high-gain and low-noise [J]. Journal of Infrared and Millimeter Waves , 2019 , 38 ( 2 ): 144 ‐ 148 .

陈浩 . W波段分谐波混频器设计 [D]. 南京 : 东南大学 , 2004 .

CHEN H . The Design of W Band Sub‐Harmonic Mixer [D]. Nanjing : Southeast University , 2004 .

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Dual-Function Switchable THz Metamaterial Absorber Based on VO₂ and Photosensitive Silicon

Intelligent Reflecting Surface Assisted Terahertz Communications Based on Array Sliding Window and Beam Routing

Frequency Tunable Terahertz Antenna Based on Graphene Sheet

Simulation and Analysis of a Tunable Polarization Converter Based on Dirac Semimetals

Terahertz Polarizer with High Extinction Ratio and High Transmittance Based on Bilayer Metal Grating

Related Author

GE Hong-yi

JIA Ke-ke

JIANG Yu-ying

ZHANG Yuan

JIAO Xiao-di

JIA Zhi-yuan

BU Yu-wei

ZHANG Yu-jie

Related Institution

School of Artificial Intelligence and Big Data, Henan University of Technology

College of Information Science and Engineering, Henan University of Technology

Henan Provincial Key Laboratory of Grain Photoelectric Detection and Control

Key Laboratory of Grain Information Processing and Control, Ministry of Education, Henan University of Technology

Vivo Mobile Communication Co.， Ltd.

⁰