Review of GeTe Phase-Change RF Switches

SHUAI Chen-yang; FU Yun-qi; ZHENG Yue-jun; CHEN Qiang; WANG Zhong-bao

doi:10.12263/DZXB.20220829

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Review of GeTe Phase-Change RF Switches

SURVEYS AND REVIEWS | 更新时间：2025-12-11

- Review of GeTe Phase-Change RF Switches
- ACTA ELECTRONICA SINICA Vol. 50, Issue 12, Pages: 3054-3072(2022)
- 作者机构：
  
  1.国防科技大学电子科学学院，湖南长沙 410000
  2.国防科技大学空天科学学院，湖南长沙 410073
- 作者简介：
- 基金信息：
- DOI：10.12263/DZXB.20220829
  CLC： TN604;TN605;TN609
- Received：14 July 2022，
  
  Revised：2022-10-02，
  
  Published：25 December 2022
- 稿件说明：
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帅陈杨,付云起,郑月军等.GeTe相变射频开关综述[J].电子学报,2022,50(12):3054-3072.

SHUAI Chen-yang,FU Yun-qi,ZHENG Yue-jun,et al.Review of GeTe Phase-Change RF Switches[J].ACTA ELECTRONICA SINICA,2022,50(12):3054-3072.
帅陈杨,付云起,郑月军等.GeTe相变射频开关综述[J].电子学报,2022,50(12):3054-3072. DOI： 10.12263/DZXB.20220829.

SHUAI Chen-yang,FU Yun-qi,ZHENG Yue-jun,et al.Review of GeTe Phase-Change RF Switches[J].ACTA ELECTRONICA SINICA,2022,50(12):3054-3072. DOI： 10.12263/DZXB.20220829.

摘要

GeTe相变射频（Radio Frequency，RF）开关作为一门新兴的射频开关技术，一经提出便迅速成为研究热点.该开关利用GeTe相变材料热致相变特性，实现晶态低电阻和非晶态高电阻之间的相互转换，具有低插损、高截止频率、低功耗、非易失、易集成等特点，在5G、毫米波以及未来的6G无线通信中具有巨大的应用价值.本文系统阐述了GeTe相变射频开关的工作原理、结构与工艺的进展、重要性能指标的优化以及应用现状，指出了其在未来的发展方向和应用前景，以期对后续GeTe相变射频开关的研究提供有益的参考.

Abstract

As a new radio frequency(RF) switch technology

GeTe phase-change RF switch has been a research hot spot. With the thermal phase-change property of GeTe materials

the switch can realize a transition between the crystalline state of low resistance and the amorphous state of high resistance. And the switch possesses these unique characteristics of low insertion loss

high cut-off frequency

low power consumption

non-volatility

easy integration

and so on

resulting in a great application value in 5G

milimeter wave

and 6G wireless communication in the future. In this review

we expound its operation principles

development of the structure and fabrication process

optimization of important properties

and application status. Then

its developing direction and application prospect are analysed. In the end

we hope that this review can provide a valuable guidance for the subsequent research.

关键词

Keywords

references

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