Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators

ZHAO Ji-cong; LÜ Shi-tao; ZHANG Ao-yu; SONG Chen-guang; SUN Hai-yan

doi:10.12263/DZXB.20220897

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Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators

PAPERS | 更新时间：2025-07-02

- Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators
- ACTA ELECTRONICA SINICA Vol. 51, Issue 1, Pages: 222-230(2023)
- 作者机构：
  
  1.南通大学江苏省专用集成电路设计重点实验室，江苏南通 226019
  2.南通大学信息科学技术学院，江苏南通 226019
  3.南通大学电气工程学院，江苏南通 226019
- 作者简介：
- 基金信息：
- DOI：10.12263/DZXB.20220897
  CLC： TN4;TN712
- Received：26 July 2022，
  
  Revised：2022-10-07，
  
  Published：25 January 2023
- 稿件说明：
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赵继聪,吕世涛,张敖宇等.氮化铝Lamb波谐振器的能量损耗分析研究[J].电子学报,2023,51(01):222-230.

ZHAO Ji-cong,LÜ Shi-tao,ZHANG Ao-yu,et al.Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators[J].ACTA ELECTRONICA SINICA,2023,51(01):222-230.
赵继聪,吕世涛,张敖宇等.氮化铝Lamb波谐振器的能量损耗分析研究[J].电子学报,2023,51(01):222-230. DOI： 10.12263/DZXB.20220897.

ZHAO Ji-cong,LÜ Shi-tao,ZHANG Ao-yu,et al.Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators[J].ACTA ELECTRONICA SINICA,2023,51(01):222-230. DOI： 10.12263/DZXB.20220897.

摘要

本文介绍了工作频率为400 MHz和2 GHz氮化铝Lamb波谐振器的结构设计、微纳制造及测试表征，研究了锚点损耗和声子间相互作用损耗对Lamb波谐振器品质因数（

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值）的影响，并分析了不同工作频率的Lamb波谐振器的主要能量损耗来源.研究发现：对于低频谐振器，锚点损耗为其主要能量损耗来源，因此减小支撑轴宽度可减少通过支撑轴泄漏至衬底的能量，进而提高

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值；对于高频谐振器，声子间相互作用损耗为其主要能量损耗来源，因此相比于金（Au），采用铝（Al）作为叉指电极（IDT）材料的谐振器具有更高

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值.针对Lamb波谐振器的结构特点，设计了一套基于七步光刻工艺的微纳制程，成功制备了具有微型化释放腔体的Lamb波谐振器，并具备优异的性能.测试结果表明，工作频率为400 MHz和2 GHz的Al-IDT谐振器的串联品质因数（

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）分别达到2 590和1 192.

Abstract

In this paper

the structural design

micro-nano fabrication and test characterization of AlN Lamb wave resonators with operating frequencies of 400 MHz and 2 GHz were studied. The effects of anchor loss and interaction loss between phonons on the quality factor (

value) of Lamb wave resonators were analyzed

and the main energy loss sources of Lamb wave resonators at different operating frequencies were clarified. The results show that for low-frequency resonators

the anchor loss is the main source of energy loss

so reducing the width of the support shaft can reduce the energy leaking to the substrate through the support shaft

thereby increasing the

value. For high-frequency resonators

the loss of interaction between phonons is the main source of energy loss

so the resonator using aluminum (Al) as the interdigital electrode (IDT) material has a higher

value than gold (Au). According to the structural characteristics of the designed Lamb wave resonators

a fabrication technology based on seven-step lithography process was designed

and the Lamb wave resonators with miniaturized release cavities were successfully fabricated with excellent performance. The test results show that the series quality factors (

) of Al-IDT resonators operating at 400 MHz and 2 GHz reach 2 590 and 1 192

respectively.

关键词

Keywords

references

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