Design of Novel CMOS Coupled Filters Based on Spoof Surface Plasmon Polaritons

WU Jie-min; LU Kai; WANG Jiang-peng; GAO Hao; DUAN Zong-ming; CUI Tie-jun; BAO Di

doi:10.12263/DZXB.20221260

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Design of Novel CMOS Coupled Filters Based on Spoof Surface Plasmon Polaritons

THz metasuface technology and application | 更新时间：2025-12-08

- Design of Novel CMOS Coupled Filters Based on Spoof Surface Plasmon Polaritons
- ACTA ELECTRONICA SINICA Vol. 51, Issue 10, Pages: 2708-2714(2023)
- 作者机构：
  
  1.东南大学电磁空间研究院,江苏南京 210096
  2.东南大学毫米波国家重点实验室,江苏南京 210096
  3.奥地利国家半导体实验室,奥地利林茨 4020
  4.中国电子科技集团公司第三十八研究所,安徽合肥 230088
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China(62288101);National Key Research and Development Program of China(2017YFA0700201;2017YFA0700202;2017YFA0700203);Discipline Innovation and Talent Introduction Program in Higher Education Institutions(111-2-05);Jiangsu Province Frontier Leading Technology Basic Research Project(BK20212002);National Science and Technology Department of China grant(G2021016011L)
- DOI：10.12263/DZXB.20221260
  CLC： TN713;
- Received：01 November 2022，
  
  Revised：2023-05-07，
  
  Published：25 October 2023
- 稿件说明：
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吴杰民,陆恺,汪江鹏等.基于CMOS的新型人工表面等离激元滤波器设计[J].电子学报,2023,51(10):2708-2714.

WU Jie-min,LU Kai,WANG Jiang-peng,et al.Design of Novel CMOS Coupled Filters Based on Spoof Surface Plasmon Polaritons[J].ACTA ELECTRONICA SINICA,2023,51(10):2708-2714.
吴杰民,陆恺,汪江鹏等.基于CMOS的新型人工表面等离激元滤波器设计[J].电子学报,2023,51(10):2708-2714. DOI： 10.12263/DZXB.20221260.

WU Jie-min,LU Kai,WANG Jiang-peng,et al.Design of Novel CMOS Coupled Filters Based on Spoof Surface Plasmon Polaritons[J].ACTA ELECTRONICA SINICA,2023,51(10):2708-2714. DOI： 10.12263/DZXB.20221260.

摘要

本文基于0.18 μm CMOS工艺提出了一种新型微波人工表面等离激元（Spoof Surface Plasmon Polariton，SSPP）耦合式滤波器结构并进行加工和测量，同时设计了一种太赫兹SSPP四边形滤波器并进行了全波仿真.新型微波SSPP耦合式滤波器通带为11~12.3 GHz（

-10 dB，

-3.5 dB），结构紧凑，电尺寸仅为0.018 4

× 0.008 4

，远小于其他基于集成电路工艺设计的无源滤波器.通过优化与调整，可以将新型微波SSPP耦合式滤波器的性能进一步优化到要求范围内.太赫兹SSPP四边形滤波器通带为210.8~241.3 GHz（

-10 dB，

-4.7 dB），带内插入损耗仅为2.7 dB，带外抑制良好.两种SSPP滤波器均采用非接触式电磁耦合的新型能量传递方式，结构设计新颖，并且微波段SSPP耦合式滤波器小型化优势明显，电尺寸仅为0.019

× 0.009

，易于芯片集成.本文提出的两种SSPP滤波器经过等比例缩放，可工作在微波、毫米波以及太赫兹频段，为新型片上无源滤波器的研究设计提供参考和借鉴.

Abstract

In this paper

a novel SSPP (Spoof Surface Plasmon Polariton) filter is proposed

fabricated and measured based on 0.18 μm CMOS technology. Meanwhile an extra terahertz SSPP filter is designed and its full-wave simulations are provided to prove feasibility in THz band. This novel SSPP filter has a passband of 11~12.3 GHz (

-10 dB

-3.5 dB)

and its size is compact with only 0.018 4

× 0.008 4

in electrical size

making it much smaller than other passive filters designed in IC technology. A designed terahertz frequency band SSPP filter

with a full EM simulated passband of 210.8~241.3 GHz (

-10 dB

-4.7 dB)

possesses an in-band insertion loss less than 2.7 dB and an superior out-of-band suppression. Both types of SSPP filters adopt a new energy transfer method of non-contact electromagnetic coupling

with a novel structural design. Moreover

the miniaturization advantage of the microwave section SSPP coupled filter is obvious

with an electrical size of only 0.019

× 0.009

easy to integrate with chips. Equally scaled novel filters proposed in this work can work in microwave

millimeter wave and terahertz frequency band

which could be a reference for the research of on-chip filters in the future.

关键词

Keywords

references

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