Research and Functional Verification of Integrated Programmable Photonic Chips

LI Zhi-hui; LIANG Yu-xin; FAN Shi-jia; LIAO Hai-jun; LIU Da-peng; FENG Jing; CUI Nai-di

doi:10.12263/DZXB.20221398

您当前的位置：

首页 >

文章列表页 >

Research and Functional Verification of Integrated Programmable Photonic Chips

PAPERS | 更新时间：2025-12-11

- Research and Functional Verification of Integrated Programmable Photonic Chips
- ACTA ELECTRONICA SINICA Vol. 52, Issue 5, Pages: 1524-1533(2024)
- 作者机构：
  
  联合微电子中心有限责任公司硅基光电子中心，重庆 401332
- 作者简介：
- 基金信息：
  
  National Key Research and Development Program of China(2022YFB2802703);National Natural Science Foundation of China(62105051)
- DOI：10.12263/DZXB.20221398
  CLC： TN256;TN252
- Received：15 December 2022，
  
  Revised：2023-04-27，
  
  Published：25 May 2024
- 稿件说明：
移动端阅览
李智慧,梁宇鑫,范诗佳,等. 集成可编程光芯片的研究与功能验证[J]. 电子学报,2024,52(05):1524-1533.

LI Zhi-hui, LIANG Yu-xin, FAN Shi-jia, et al. Research and Functional Verification of Integrated Programmable Photonic Chips[J]. Acta Electronica Sinica, 2024, 52(05): 1524-1533.
李智慧,梁宇鑫,范诗佳,等. 集成可编程光芯片的研究与功能验证[J]. 电子学报,2024,52(05):1524-1533. DOI：10.12263/DZXB.20221398

LI Zhi-hui, LIANG Yu-xin, FAN Shi-jia, et al. Research and Functional Verification of Integrated Programmable Photonic Chips[J]. Acta Electronica Sinica, 2024, 52(05): 1524-1533. DOI：10.12263/DZXB.20221398

摘要

随着对高速、超紧凑数据信号管理需求的日益增长，光子集成电路（Photonics Integrated Circuits，PIC）在先进的光子信号处理中受到广泛关注，其中可编程光芯片因其特有的通用性、可重构特性逐渐受到开发者的青睐.本文依托联合微电子中心有限责任公司（United MicroElectronics Center Co. Ltd，CUMEC）的绝缘体上硅（Silicon-On-Insulator，SOI）自主工艺平台，设计并制备了包含9个六边形单元的3×3六边形架构可编程光芯片，利用迭代扫描法实现了消光比高达30 dB的开关电压标定，并通过扁平化版图优化设计使芯片尺寸降低了21%；采用此可编程光芯片进一步完成了典型功能验证：通过对输入输出端的可调基本单元（Tunable Basic Unit，TBU）耦合系数进行调谐，可实现消光比、谐振波长、自由光谱范围可调的马赫曾德尔干涉仪（Mach-Zehnder Interferometer，MZI）/ 微环谐振腔（Micro-Ring Resonator，MRR），消光比可高达42.3 dB/28 dB；可实现延时量大范围可调谐的延时线及任意输入/输出端口之间的路由.该芯片是目前世界上规模最大的六边形架构可编程光芯片，并实现了与有源单元的单片集成，在微波光子信号处理、化学生物传感、量子信息、光计算领域具有广阔的应用前景.

Abstract

With the increasing demand for high-speed

ultra-compact data signal management

photonics integrated circuits (PIC) have attracted extensive attention in advanced photonic signal processing. Programmable photonic chips are gradually becoming favored by developers for their inherent generic and reconfigurable features. Based on United Microelectronics Center Co.

Ltd (CUMEC) silicon-on-insulator (SOI) integrated photonics platform

we have designed and fabricated a 3×3 hexagon-shape programmable photonic chip containing 9 hexagon units. The optical switch's extinction ratio of up to 30 dB was achieved by the “Iteration Scanning Method”

and there is a 21% chip size reduction through “Flatting” layout optimization. The typical functions of this programmable chip are further verified by tuning the input/output coupling coefficients of tunable basic unit (TBU). This allows for a Mach-Zehnder interferometer (MZI) or a micro-ring resonator (ORR) with a tunable extinction ratio

resonance wavelength and free spectra range to be realized

and the corresponding extinction ratio can reach 42.3 dB and 28 dB

respectively. Other functions

such as an optical delay line with a wide tunable range

as well as routing between any input and output ports

are also successfully realized with this programmable photonic chip. This is the largest scale hexagon-shape programmable chip which could be integrated with active devices. This chip offers a wide range of potential applications

in the areas of microwave photonics signal processing

bio-chemical sensing

quantum information and optical computing.

关键词

Keywords

references

BOGAERTS W , BAETS R , DUMON P , et al . Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology [J ] . Journal of Lightwave Technology , 2005 , 23 ( 1 ): 401 - 412 .

LEINSE A , HEIDEMAN R G , HOEKMAN M , et al . TriPleX waveguide platform: Low-loss technology over a wide wavelength range [C ] // Proceedings Volume 8767, Integrated Photonics: Materials, Devices, and Applications Ⅱ; 87670 E (2013) . Grenoble:SPIE, 2013 : 86 - 98 .

BOGAERTS W , FIERS M , DUMON P . Design challenges in silicon photonics [J ] . IEEE Journal of Selected Topics in Quantum Electronics , 2014 , 20 ( 4 ): 8202008 .

GUAN B B , DJORDJEVIC S S , FONTAINE N K , et al . CMOS compatible reconfigurable silicon photonic lattice filters using cascaded unit cells for RF-photonic processing [J ] . IEEE Journal of Selected Topics in Quantum Electronics , 2014 , 20 ( 4 ): 8202110 .

BOGAERTS W , PÉREZ D , CAPMANY J , et al . Programmable photonic circuits [J ] . Nature , 2020 , 586 : 207 - 216 .

P'EREZ D , GASULLA I , MAHAPATRA P DAS , et al . Principles, fundamentals, and applications of programmable integrated photonics [J ] . Advances in Optics and Photonics , 2020 , 12 ( 3 ): 709 - 786 .

RECK M , ZEILINGER A , BERNSTEIN H J , et al . Experimental realization of any discrete unitary operator [J ] . Physical Review Letters , 1994 , 73 ( 1 ): 58 - 61 .

MILLER D A B . Self-configuring universal linear optical component [J ] . Photonics Research , 2013 , 1 ( 1 ): 1 - 15 .

CLEMENTS W R , HUMPHREYS P C , METCALF B J , et al . Optimal design for universal multiport interferometers [J ] . Optica , 2016 , 3 ( 12 ): 1460 - 1465 .

ZHUANG L M , ROELOFFZEN C G H , HOEKMAN M , et al . Programmable photonic signal processor chip for radiofrequency applications [J ] . Optica , 2015 , 2 ( 10 ): 854 - 859 .

PÉREZ D , GASULLA I , CAPMANY J , et al . Reconfigurable lattice mesh designs for programmable photonic processors [J ] . Optics Express , 2016 , 24 ( 11 ): 12093 - 12106 .

PÉREZ D , GASULLA I , CRUDGINGTON L , et al . Multipurpose silicon photonics signal processor core [J ] . Nature Communications , 2017 , 8 : 636 .

CAO X P , ZHENG S , LONG Y , et al . Mesh-structure-enabled programmable multitask photonic signal processor on a silicon chip [J ] . ACS Photonics , 2020 , 7 ( 10 ): 2658 - 2675 .

CHEN X F , BOGAERTS W . A graph-based design and programming strategy for reconfigurable photonic circuits [C ] // 2019 IEEE Photonics Society Summer Topical Meeting Series (SUM) . Piscataway : IEEE , 2019 : 1 - 2 .

PÉREZ D , CAPMANY J . Scalable analysis for arbitrary photonic integrated waveguide meshes [J ] . Optica , 2019 , 6 ( 1 ): 19 - 27 .

PÉREZ D , GASULLA I , CAPMANY J , et al . Hexagonal waveguide mesh design for universal multiport interferometers [C ] // 2016 IEEE Photonics Conference (IPC) . Piscataway : IEEE , 2016 : 285 - 286 .

ZHOU H L , ZHAO Y H , XU G X , et al . Chip-scale optical matrix computation for PageRank algorithm [J ] . IEEE Journal of Selected Topics in Quantum Electronics , 2020 , 26 ( 2 ): 8300910 .

曹国威 , 范诗佳 , 李智慧 , 等 . 光FPGA芯片及其标定方法 [J ] . 科学技术创新 , 2022 , ( 33 ): 101 - 105 .

CAO G W , FAN S J , LI Z H , et al . Optical FPGA chip and its calibration method [J ] . Scientific and Technological Innovation , 2022 , ( 33 ): 101 - 105 . (in Chinese)

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Research on Reconfigurable NTT Arithmetic Unit and Efficient Scheduling Algorithm for Lattice Post-Quantum Cryptography

Research on Energy-Efficient Parallel Sampling Algorithm and Hardware Architecture for Lattice-Based Post-Quantum Ciphers

Design of Multimode Reconfigurable Low Noise Amplifier for UWB Applications

Design Method and Performance Limit Analysis of Reconfigurable Metasurface Element Based on Microwave Network Theory

Related Author

FU Qiu-xing

LI Wei

BIE Meng-ni

CHEN Tao

NAN Long-mei

BIE Meng-ni

FU Qiu-xing

DU Yi-ran

Related Institution

University of Information Engineering

Shenzhen New Radio Technology Co., Ltd.

Engineering Research Center of Flexible Radiation Protection Technology of Universities of Shaanxi Province

School of Science, Xi’an Polytechnic University

Department of Electronic Engineering， Tsinghua University

⁰