Research Progress on Integrated Triboelectric Self-Powered Gas and Humidity Sensors

LIU Bo-hao; XIE Guang-zhong; DUAN Zai-hua; YUAN Zhen; JIANG Ya-dong; TAI Hui-ling

doi:10.12263/DZXB.20231003

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Research Progress on Integrated Triboelectric Self-Powered Gas and Humidity Sensors

SURVEYS AND REVIEWS | 更新时间：2025-12-11

- Research Progress on Integrated Triboelectric Self-Powered Gas and Humidity Sensors
- ACTA ELECTRONICA SINICA Vol. 52, Issue 2, Pages: 660-677(2024)
- 作者机构：
  
  电子科技大学光电科学与工程学院，电子薄膜与集成器件国家重点实验室，四川成都 611731
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China(62225106;62301114;62101105)
- DOI：10.12263/DZXB.20231003
  CLC： TM619;TP212
- Received：26 October 2023，
  
  Revised：2024-02-12，
  
  Published：25 February 2024
- 稿件说明：
移动端阅览
刘勃豪, 谢光忠, 段再华, 等. 一体化摩擦电自供能气湿传感器研究进展[J]. 电子学报, 2024, 52(02): 660-677.

LIU Bo-hao, XIE Guang-zhong, DUAN Zai-hua, et al. Research Progress on Integrated Triboelectric Self-Powered Gas and Humidity Sensors[J]. Acta Electronica Sinica, 2024, 52(02): 660-677.
刘勃豪, 谢光忠, 段再华, 等. 一体化摩擦电自供能气湿传感器研究进展[J]. 电子学报, 2024, 52(02): 660-677. DOI：10.12263/DZXB.20231003

LIU Bo-hao, XIE Guang-zhong, DUAN Zai-hua, et al. Research Progress on Integrated Triboelectric Self-Powered Gas and Humidity Sensors[J]. Acta Electronica Sinica, 2024, 52(02): 660-677. DOI：10.12263/DZXB.20231003

摘要

气湿传感器在环境检测、工农业生产以及医疗健康等领域应用甚广，然而主流的电阻、电容、光电气湿传感器需要外部供能工作，一方面电池的频繁更换与维护增加了泄露引起的环境污染，另一方面传感器对外界能源过于依赖将限制其在缺乏能源的场合中正常工作.鉴于此，通过赋予气湿传感器自发收集外界环境能量并转化成电能的能力，以实现长期自主工作的自供能气湿传感器的理念应运而生.摩擦纳米发电机（TriboElectric NanoGenerator，TENG）作为一种新型能量俘获装置，由于其成本低、可结构设计且能量转换效率高等优势，在机械能收集与自供能传感器等领域应用广泛.进一步赋予TENG外界信息感知的能力，可实现单一器件兼具能量收集与气体敏感的功能，这种一体化摩擦电自供能传感器是目前传感器领域发展的一个热点方向.本文对一体化摩擦电自供能气湿传感器的研究现状与最新进展进行了综述，可从以下三个方面进行概括.（1）一体化摩擦电气湿传感器工作原理与气敏机理，并基于TENG的等效电路模型论述了影响敏感性能的参数—介电层摩擦电荷密度、介电层介电常数与电极层电导率；（2）一体化摩擦电气体传感器的研究进展，根据检测对象将其主要分为氨气（Ammonia，NH

）、乙醇以及其他有机挥发化合物（Volatile Organic Compound，VOC）气体传感器，介绍了其在呼出气、食品变质以及尾气排放检测场合的应用；（3）一体化摩擦电湿度传感器的研究进展，根据湿度对输出电信号幅值影响的不同将其主要分为电信号下降型传感器与电信号上升型传感器，介绍了其在非接触开关、皮肤湿度与尿不湿检测场合的应用.最后对一体化摩擦电气湿传感器的研究现状与面临的问题挑战进行了总结，并对其未来的发展方向进行了展望，可为相关研究提供参考.

Abstract

Gas and humidity sensors are widely applied in various fields such as environmental detection

industrial and agricultural production

and medical health. However

the mainstream reported resistive

capacitive

and optoelectric gas/humidity sensors require external energy supply

not only causing the environment pollution from the battery leakage after frequently changed and maintained

but also restricting the sensor’s operation under the energy shortage circumstance. As one of the novel energy harvesting devices

triboelectric nanogenerators (TENG) have been widely applied in mechanical energy harvesting and self-powered sensors owing to the merits of low-cost

designable structure

and high energy conversion efficiency. Furthermore

researchers have endowed TENG with the ability of acquiring information from the outside

which is expected to integrate the energy collection and sensing unit into one device. The above-mentioned integrated triboelectric self-powered sensor is one of the hottest topics in the sensing technique. This article provides a review of the current research status and latest progress of integrated triboelectric self-powered gas /humidity sensors

which can be summarized from the following three aspects. (1) The working principle and gas sensing mechanism of integrated triboelectric gas/humidity sensors. Meanwhile

parameters (triboelectric charges density and dielectric constant of dielectric layer

conductivity of electrode layer) that affect the sensing performances are discussed based on TENG’s equivalent circuit model. Triboelectric charges density can be effectively influenced based on the screening effect of the condensed thin film on the friction surface or the electrons transfer between the friction surface and the gas/water molecules

resulting in the increased/decreased equivalent triboelectric charges; Output changes based on dielectric constant of the dielectric layer (also the triboelectric layer) usually occur in the situation where there is a significant difference in the dielectric constant between the test sample and the dielectric layer. However

the limited gas/water adsorption causes little changes in dielectric constant

resulting in the poor sensing response; Variations of the output changes of TENG based on the resistances change of the sensing electrode can be attributed to the Kirchhoff voltage divider law

where the voltage received by each load is directly proportional to its impedance in a series circuit. However

owing to the high impedance of the air layer and dielectric layers

significant resistance/impedance changes of sensing electrodes during sensing period are demanded

restricting the material selection. (2) The research progresses of integrated triboelectric gas sensors (TGS) are mainly divided into ammonia (NH

)

ethanol

and other volatile organic compound (VOC) gas sensors according to the detection subjects. Furthermore

the applications of TGS in detecting exhaled gas

food spoilage

and exhaust emissions are introduced. (3) Based on the different effects of humidity on the amplitude of output electrical signals

the research progresses of integrated triboelectric humidity sensors (THS) are mainly divided into the sensors with the performances of humidity induced signal drops and rises. Furthermore

the applications of THS in non-contact switches

skin humidity and diaper detection are introduced. Finally

the research status and challenges of TGS and THS are summarized. Meanwhile

the prospects of the future development are illustrated

providing references for the future research of integrated triboelectric self-powered gas/humidity sensors.

关键词

Keywords

references

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