Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity

ZHAO Yi-xuan; LI Chang; ZHANG Xuan; PAN Ting-yang; DUAN Bing; YANG Da-quan

doi:10.12263/DZXB.20240414

您当前的位置：

首页 >

文章列表页 >

Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity

Special Focus: Recipient of CIE Outstanding Doctoral Dissertation | 更新时间：2025-12-08

- Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity
- ACTA ELECTRONICA SINICA Vol. 53, Issue 1, Pages: 41-50(2025)
- 作者机构：
  
  1.北京邮电大学信息光子学与光通信国家重点实验室，北京 100876
  2.北京邮电大学信息与通信工程学院，北京 100876
- 作者简介：
- 基金信息：
  
  Natural Science Foundation of Beijing Municipality(Z210004)
- DOI：10.12263/DZXB.20240414
  CLC： TP212.1;
- Received：07 May 2024，
  
  Revised：2024-11-10，
  
  Published：25 January 2025
- 稿件说明：
移动端阅览
赵义轩, 李昶, 张璇, 等. 超高品质因子微棒腔的制备封装及传感应用[J]. 电子学报, 2025, 53(01): 41-50.

ZHAO Yi-xuan, LI Chang, ZHANG Xuan, et al. Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity[J]. Acta Electronica Sinica, 2025, 53(01): 41-50.
赵义轩, 李昶, 张璇, 等. 超高品质因子微棒腔的制备封装及传感应用[J]. 电子学报, 2025, 53(01): 41-50. DOI：10.12263/DZXB.20240414

ZHAO Yi-xuan, LI Chang, ZHANG Xuan, et al. Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity[J]. Acta Electronica Sinica, 2025, 53(01): 41-50. DOI：10.12263/DZXB.20240414

摘要

作为回音壁模式（Whispering Gallery Mode，WGM）光学微腔的重要参数之一，超高的品质因子意味着微腔可以在非线性光学、相干光通信以及微波光子学等领域具备更优异的特性，更广阔的应用前景.为了提高微腔的品质因子，本文基于自动化程序控制微腔制备，并优化了抛光以及退火工艺，所制备得到的二氧化硅微棒腔具有超高品质因子、低成本、高效率等特点，品质因子最高可达3×10

.基于集成温控的模块化封装方案，提高了微腔耦合系统的抗干扰能力，1 h的频率偏移量可以降低为原来的1/10.超高品质因子带来了超低的非线性效应阈值功率（低至266 μW），本文基于微棒腔产生的克尔光频梳进行了传感应用实验，实现了传感灵敏度为8.40 pm/℃，测量范围超过30 ℃的环境温度多模传感.本文的研究成果为高精度传感、大容量光通信、低阈值激光器等应用提供了强有力的工具.

Abstract

As one of the important parameters of the whispering gallery mode (WGM) optical microcavity

the high quality factor means that the microcavity can have better characteristics and broader application prospects in the fields of nonlinear optics

coherent optical communication and microwave photonics. In order to improve the quality factor of the microcavity

this paper controls the fabrication of the microcavity based on the automatic program

and optimized the polishing and annealing processes. The prepared silica microrod cavity has the characteristics of ultra-high quality factor

low cost and high efficiency

and the quality factor can reach up to 3×10

. Based on the modular package scheme

of integrated temperature control

the anti-interference ability of the microcavity coupling system is improved

and the frequency offset of one hour can be reduced by 10 times. With the ultra-low nonlinear threshold power (as low as 266 μW) brought by the ultra-high quality factor

this paper conducts sensing application experiments based on the Kerr optical frequency comb-generated by the microrod cavity

and realizes the multi-mode ambient temperature sensing with a sensing sensitivity of 8.40 pm/℃ and a measuring range of more than 30 ℃. The research results of this paper provide a powerful tool for high precision sensing

large capacity optical communication

low threshold laser and other applications.

关键词

Keywords

references

LIHACHEV G , RIEMENSBERGER J , WENG W L , et al . Low-noise frequency-agile photonic integrated lasers for coherent ranging [J ] . Nature Communications , 2022 , 13 ( 1 ): 3522 .

RIEMENSBERGER J , LUKASHCHUK A , KARPOV M , et al . Massively parallel coherent laser ranging using a soliton microcomb [J ] . Nature , 2020 , 581 ( 7807 ): 164 - 170 .

LUKASHCHUK A , RIEMENSBERGER J , KARPOV M , et al . Dual chirped microcomb based parallel ranging at megapixel-line rates [J ] . Nature Communications , 2022 , 13 ( 1 ): 3280 .

FUJII S , TANAKA S , OHTSUKA T , et al . Dissipative Kerr soliton microcombs for FEC-free optical communications over 100 channels [J ] . Optics Express , 2022 , 30 ( 2 ): 1351 - 1364 .

GUIDRY M A , LUKIN D M , YANG K Y , et al . Quantum optics of soliton microcombs [J ] . Nature Photonics , 2022 , 16 : 52 - 58 .

LIU B Y , GENG Y , ZHANG Q , et al . All-optical carrier recovery for self-homodyne detection via injection locked Brillouin laser in whispering-gallery-mode microcavity [J ] . Chinese Optics Letters , 2021 , 19 ( 11 ): 111901 .

YUAN Z Q , WANG H M , WU L , et al . Linewidth enhancement factor in a microcavity Brillouin laser [J ] . Optica , 2020 , 7 ( 9 ): 1150 .

MOILLE G , PEREZ E F , STONE J R , et al . Ultra-broadband Kerr microcomb through soliton spectral translation [J ] . Nature Communications , 2021 , 12 ( 1 ): 7275 .

SUMETSKY M , DULASHKO Y , WINDELER R S . Optical microbubble resonator [J ] . Optics Letters , 2010 , 35 ( 7 ): 898 .

DEL' HAYE P , DIDDAMS S A , PAPP S B . Laser-machined ultra-high-Q microrod resonators for nonlinear optics [J ] . Applied Physics Letters , 2013 , 102 ( 22 ): 221119 .

YAO L , LIU P , CHEN H J , et al . Soliton microwave oscillators using oversized billion Q optical microresonators [J ] . Optica , 2022 , 9 ( 5 ): 561 .

KIPPENBERG T J , KALKMAN J , POLMAN A , et al . Demonstration of an erbium doped microdisk laser on a silicon chip [C ] // 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference . Piscataway : IEEE , 2006 : 1 - 2 .

LEE H , CHEN T , LI J , et al . Chemically etched ultrahigh-Q wedge-resonator on a silicon chip [J ] . Nature Photonics , 2012 , 6 : 369 - 373 .

WU L , WANG H M , YANG Q F , et al . Greater than one billion Q factor for on-chip microresonators [J ] . Optics Letters , 2020 , 45 ( 18 ): 5129 - 5131 .

SANTIAGO-CORDOBA M A , BORISKINA S V , VOLLMER F , et al . Nanoparticle-based protein detection by optical shift of a resonant microcavity [J ] . Applied Physics Letters , 2011 , 99 ( 7 ): 073701 .

ZHU J G , OZDEMIR S K , XIAO Y F , et al . On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator [J ] . Nature Photonics , 2010 , 4 : 46 - 49 .

SHAO L B , JIANG X F , YU X C , et al . Detection of single nanoparticles and lentiviruses using microcavity resonance broadening [J ] . Advanced Materials , 2013 , 25 ( 39 ): 5616 - 5620 .

VOLLMER F , ARNOLD S , KENG D . Single virus detection from the reactive shift of a whispering-gallery mode [J ] . Proceedings of the National Academy of Sciences of the United States of America , 2008 , 105 ( 52 ): 20701 - 20704 .

NAWROCKA M S , LIU T , WANG X , et al . Tunable silicon microring resonator with wide free spectral range [J ] . Applied Physics Letters , 2006 , 89 ( 7 ): 071110 .

MALLIK A K , FARRELL G , LIU D J , et al . A coated spherical microresonator for measurement of water vapor concentration at PPM levels in very low humidity environments [J ] . Journal of Lightwave Technology , 2018 , 36 ( 13 ): 2667 - 2674 .

YAO B C , YU C B , WU Y , et al . Graphene-enhanced brillouin optomechanical microresonator for ultrasensitive gas detection [J ] . Nano Letters , 2017 , 17 ( 8 ): 4996 - 5002 .

YANG D Q , CHEN J H , CAO Q T , et al . Operando monitoring transition dynamics of responsive polymer using optofluidic microcavities [J ] . Light, Science and Applications , 2021 , 10 ( 1 ): 128 .

WU Y R , DUAN B , SONG J E , et al . Simultaneous temperature and pressure sensing based on a single optical resonator [J ] . Optics Express , 2023 , 31 ( 12 ): 18851 - 18861 .

CHEN W , YAO L , LI C , et al . Ultrahigh-Q packaged silica microrod cavity for microcomb generation [C ] // 2022 Conference on Lasers and Electro-Optics (CLEO) . Piscataway : IEEE , 2022 : 1 - 2 .

LI C , CHEN W , DUAN B , et al . A highly stable and 2.4 × 10 9 quality factor packaged microrod resonator [C ] // 2023 Conference on Lasers and Electro-Optics (CLEO) . Piscataway : IEEE , 2023 : 1 - 2 .

YANG D Q , GUO Y Y , CHEN W , et al . Ultrahigh efficiency four-wave mixing wavelength conversion in packaged silica microrod resonator [J ] . Journal of Lightwave Technology , 2023 , 41 ( 6 ): 1768 - 1774 .

WANG J , ZHU B W , HAO Z Z , et al . Thermo-optic effects in on-chip lithium niobate microdisk resonators [J ] . Optics Express , 2016 , 24 ( 19 ): 21869 - 21879 .

LIU S P , FENG J B , TIAN Y , et al . Thermo-optic phase shifters based on silicon-on-insulator platform: State-of-the-art and a review [J ] . Frontiers of Optoelectronics , 2022 , 15 ( 1 ): 9 .

YI X , YANG Q F , YANG K Y , et al . Soliton frequency comb at microwave rates in a high-Q silica microresonator [J ] . Optica , 2015 , 2 ( 12 ): 1078 .

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

⁰