Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO<sub>2</sub>

WU Hai-yang; YU Ning-mei

doi:10.12263/DZXB.20240624

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Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO₂

PAPERS | 更新时间：2025-12-08

- Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO₂
  增强出版
- ACTA ELECTRONICA SINICA Vol. 53, Issue 3, Pages: 811-820(2025)
- 作者机构：
  
  西安理工大学自动化与信息工程学院，陕西西安 710048
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China(62404179);Scientific Research Plan Projects of Shaanxi Education Department(23JK0568);Natural Science Basic Research Program of Shaanxi Province(2024JC-YBQN-0667)
- DOI：10.12263/DZXB.20240624
  CLC： TP212;
- Received：02 July 2024，
  
  Revised：2024-12-27，
  
  Published：25 March 2025
- 稿件说明：
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吴海洋, 余宁梅. 栅压可调谐的本征SnO₂乙醇传感器[J]. 电子学报, 2025, 53(03): 811-820.

WU Hai-yang, YU Ning-mei. Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO₂[J]. Acta Electronica Sinica, 2025, 53(03): 811-820.
吴海洋, 余宁梅. 栅压可调谐的本征SnO₂乙醇传感器[J]. 电子学报, 2025, 53(03): 811-820. DOI：10.12263/DZXB.20240624

WU Hai-yang, YU Ning-mei. Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO₂[J]. Acta Electronica Sinica, 2025, 53(03): 811-820. DOI：10.12263/DZXB.20240624

摘要

乙醇蒸汽因易挥发和易燃性可能会带来安全隐患，对其进行实时监测至关重要.然而，目前改善SnO

乙醇传感器性能的方法往往不利于器件的小型化.为此，论文设计了一种具有场效应管结构的本征SnO

乙醇传感器，采用磁控溅射法制备了敏感膜，系统研究了栅压对传感器气敏性能的调控作用.实验结果表明，溅射法制备的SnO

传感器为

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=83539129&type=

2.28600001

https://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=83539117&type=

1.60866666

沟道耗尽型器件.气敏测试显示，在不同工作栅压下，传感器的响应存在显著差异：当栅压为10 V时，传感器在100 ppm乙醇中电流变化为2.40倍；而在-30 V栅压下，沟道电流变化显著增强至3.42倍，比10 V时提高了42%.进一步研究发现，SnO

的气敏特性来源于乙醇分子的表面吸附对沟道中载流子浓度的调制作用.这一效应在负栅压下显著增强，而在正栅压下被抑制.然而，10 V正栅压通过在沟道中诱导产生更多电子，有效加速了乙醇的吸附与解吸过程，使传感器对100 ppm乙醇的响应和恢复时间分别缩短至8 s和17 s，展现出更快的动态特性.论文研究结果表明，乙醇蒸汽在SnO

表面发生反应的程度和速率都受到传感器栅压的显著调控.该研究为优化SnO

传感器的气敏性能提供了新思路，有助于进一步推动其在微型化、快响应、高精度气敏检测领域的应用.

Abstract

It is crucial to monitor ethanol in real time due to the safety risks posed by its high volatility and flammability. However

current methods for improving the performance of SnO

ethanol sensors often hinder the miniaturization of devices. To address this

the paper designs an intrinsic SnO

ethanol sensor with a field-effect transistor structure and employs magnetron sputtering to fabricate the sensitive film. The study systematically investigates the influence of gate voltage on the gas-sensing performance of the sensor. Experimental results indicate that the SnO

sensor prepared by sputtering is an

-channel depletion-mode device. Gas-sensing tests reveal significant differences in the sensor’s response under different operating gate voltages: at a gate voltage of 10 V

the current change of the sensor in 100 ppm ethanol is 2.40 times; while at a gate voltage of -30 V

the channel current change is significantly enhanced to 3.42 times

representing a 42% improvement compared to 10 V. Further investigation shows that the gas-sensing properties of SnO

arise from the modulation of carrier concentration in the channel by the surface adsorption of ethanol molecules. This effect is significantly enhanced under negative gate voltage but suppressed under positive gate voltage. However

a positive gate voltage of 10 V induces more electrons in the channel

effectively accelerating the adsorption and desorption processes of ethanol. As a result

the sensor’s response and reco

very times to 100 ppm ethanol are reduced to 8 s and 17 s

respectively

demonstrating faster dynamic characteristics. The study’s findings indicate that the degree and rate of ethanol vapor reaction on the SnO

surface are significantly regulated by the sensor’s gate voltage. This research provides a new approach for optimizing the gas-sensing performance of SnO

sensors and contributes to advancing their application in miniaturized

fast-response

and high-precision gas-sensing detection.

关键词

Keywords

references

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Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO2

DOI：10.12263/DZXB.20240624

摘要

Abstract

关键词

Keywords

references

Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO₂