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1. 中国电子科技集团公司第五十八研究所,江苏,无锡,214035
2. 桂林电子科技大学信息与通信学院,广西,桂林,541004
3. 中国电子科技集团公司第五十八研究所,江苏,无锡,214035
4. 桂林电子科技大学信息与通信学院,广西,桂林,541004
Published:2013
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HUANG Wei, HU Nan-zhong, LI Hai-ou, et al. HV-EL Drivers ICs on Novel HV-BCD Process Platform with Self-Extracted JTE Trench Termination[J]. Acta Electronica Sinica, 2013, 41(9): 1858-1862.
HUANG Wei, HU Nan-zhong, LI Hai-ou, et al. HV-EL Drivers ICs on Novel HV-BCD Process Platform with Self-Extracted JTE Trench Termination[J]. Acta Electronica Sinica, 2013, 41(9): 1858-1862. DOI: 10.3969/j.issn.0372-2112.2013.09.31.
本文提出可集成自提取结终端的0.35μm 150V-BCD(双极-互补金属氧化物半导体-双重扩散金属氧化物半导体)全套新型高压工艺.利用此工艺研制出100V场致发光用高低侧驱动芯片
并提出了基于双极器件BC(双极集电极)结短路自提取结终端新工艺与新结构
既可满足场致发光高压驱动芯片应用
又能取代传统采用氧化扩散工艺的P-ISO(P型隔离结构)传统隔离结构
显著简化了工艺和提高了芯片的高集成度
确保片内集成的低电阻率VDNMOS/LDPMOS(N型垂直双扩散金属氧化物半导体场效应晶体管/P型横向扩散金属氧化物半导体场效应晶体管)高压驱动模块与低压逻辑控制模块在100V高压脉冲交替工作状况下无负电位、EMMI(微光显微镜)等寄生现象出现.
A high voltage BCD(Bipolar-CMOS-DMOS)technology by using self-extracted JTE(Junction Termination Extension)trench isolation based on 0.35μm standard CMOS(Complementary Metal Oxide Semiconductor)process has been developed for LCD(Liquid Crystal Display)backlight application.In this technology
HV(High Voltage)circuit block
including low cost VDNMOS(Vertical Double Diffused N-MOS)and LDPMOS(Laterally Diffused P-MOS)with resurf principle
and LV(Low Voltage)block are integrated together.Advanced deep trench isolation technology which has higher integration than conventional P-type isolation is firstly implemented to protect LV block from HV block and sustain the d
v
/d
t
d
i
/d
t
effect with self-extracted function.The breakdown voltage is above 150V.Finally
it is shown that the performance of designed IC driver can satisfy the EL(Electroluminescent Lamps)lamp application with frequency at least 400Hz of the switch signal and the power supply is about 100V.For the simplicity of the silicon technology
the cost is saved.
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