A Technique for Extracting the Threshold Voltage of MOSFET Based on Savitzky-Golay Filter

YANG Hong-guan; ZHU Kun-shun; ZHU Xiao-jun

doi:10.3969/j.issn.0372-2112.2013.11.020

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A Technique for Extracting the Threshold Voltage of MOSFET Based on Savitzky-Golay Filter

更新时间：2025-07-16

- A Technique for Extracting the Threshold Voltage of MOSFET Based on Savitzky-Golay Filter
- Acta Electronica Sinica Vol. 41, Issue 11, Pages: 2242-2246(2013)
- 作者机构：
  
  湖南大学物理与微电子科学学院,湖南,长沙,410082
- 作者简介：
- 基金信息：
  
  Program of Science and Technology Project of Hunan Province (No.2012GK3151)
- DOI：10.3969/j.issn.0372-2112.2013.11.020
  CLC： TN386.1
- Published：2013
- 稿件说明：
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YANG Hong-guan, ZHU Kun-shun, ZHU Xiao-jun. A Technique for Extracting the Threshold Voltage of MOSFET Based on Savitzky-Golay Filter[J]. Acta Electronica Sinica, 2013, 41(11): 2242-2246.
DOI：

YANG Hong-guan, ZHU Kun-shun, ZHU Xiao-jun. A Technique for Extracting the Threshold Voltage of MOSFET Based on Savitzky-Golay Filter[J]. Acta Electronica Sinica, 2013, 41(11): 2242-2246. DOI： 10.3969/j.issn.0372-2112.2013.11.020.

摘要

MOS（Matel-Oxide-Semiconductor）器件阈值电压提取过程中的一些求导运算放大了测量数据中所包含的涨落因素（噪声和测量错误），使阈值电压提取过程变得不稳定.本文采用Savitzky-Golay低通滤波算法，求导运算和滤波过程同时进行，有效地抑制了测量数据中的涨落.再结合目标曲线峰值附近局域匹配系数判据，阈值电压提取过程就可以稳定且自动地完成，这为MOSFET（MOS Field-Effect Transistor）特性分析及集成电路设计工作带来很大方便.

Abstract

Originally from the noise and errors in measurement

the fluctuations make the extraction of MOSFET's threshold voltage unstable

which will become worse in the case of the derivation operation.We proposed that the Savitzky-Golay filtering algorithm could be introduced into the derivation process in order to alleviate the influence of fluctuations effectively.A criterion for assessing the goodness of filtering was presented

and then the extraction of threshold voltage of MOSFET could be achieved stably and automatically

which will be in favor of the characterizing MOS devices and designing integrated circuits.

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