A Monolithic MEMS Gyroscope Interface Circuit in 0.35 μm CMOS

LUO Xu-cheng; FENG Jun

doi:10.3969/j.issn.0372-2112.2014.09.032

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A Monolithic MEMS Gyroscope Interface Circuit in 0.35 μm CMOS

更新时间：2025-07-16

- A Monolithic MEMS Gyroscope Interface Circuit in 0.35 μm CMOS
- Acta Electronica Sinica Vol. 42, Issue 9, Pages: 1868-1872(2014)
- 作者机构：
  
  东南大学射频与光电集成电路研究所,江苏,南京,210096
- 作者简介：
- 基金信息：
- DOI：10.3969/j.issn.0372-2112.2014.09.032
  CLC： TN432
- Published：2014
- 稿件说明：
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LUO Xu-cheng, FENG Jun. A Monolithic MEMS Gyroscope Interface Circuit in 0.35 μm CMOS[J]. Acta Electronica Sinica, 2014, 42(9): 1868-1872.
DOI：

LUO Xu-cheng, FENG Jun. A Monolithic MEMS Gyroscope Interface Circuit in 0.35 μm CMOS[J]. Acta Electronica Sinica, 2014, 42(9): 1868-1872. DOI： 10.3969/j.issn.0372-2112.2014.09.032.

摘要

本文介绍了一种用于读取角速度信号的单片集成微机械陀螺仪接口电路，该接口电路采用了相关双采样技术以抑制1/

噪声和运算跨导放大器的失调.为了方便系统仿真和测试，本文设计了一种微机械陀螺仪的等效电路.该接口电路采用0.35 m CMOS工艺设计并制造，芯片总面积为1.09mm0.87mm.后仿真结果表明，该接口电路能达到0.58aF的电容分辨精度，动态范围达99.7dB.测试结果表明，接口电路系统增益为26.6mV/fF，在3.5V电源电压下系统总功耗为20.4mW.

Abstract

This paper presents a monolithic micro-electro-mechanical systems (MEMS) gyroscope interface circuit for angular velocity signal readout.The proposed interface circuit uses correlated double sampling (CDS) to reject 1/

noise and the offset from operational transconductance amplifiers (OTAs).In order to facilitate the circuit simulation and the test

a MEMS gyroscope equivalent circuit is developed.The interface circuit has been fabricated in 0.35 mCMOS process

and the chip area is 1.09mm0.87mm.Post-layout simulation results show that the interface circuit has a capacitance resolution of 0.58aF

and the dynamic range is 99.7dB.Test results show that the system gain is 26.6mV/fF

and the total power consumption is 20.4mW with a 3.5V power supply.

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