MEMS-based smart sensing system (Smart Dust) with ultra small size and low power consumption is integrated by multi-functional sensors including information detection

process and interexchange

it also contains the composite energy system with energy harvesting system and power management programs.Such device therefore is able to work either autonomously or collaboratively.This paper is to clarify fundamentals and applications of smart dust technology

followed by its architecture design of such device.And then

focus will be given on several critical issues and technical difficulties by the development trajectory and interrelated technologies of smart dust.Finally

the feasibility to achieve such integrated multi-function sensing system with MEMS manufactory engineering techniques will be addressed.