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1. 昌吉学院物理系,新疆,昌吉,831100
2. 南京大学电子科学与工程学院,江苏,南京,210093
3. 昌吉学院物理系,新疆,昌吉,831100
4. 南京大学电子科学与工程学院,江苏,南京,210093
Published Online:25 June 2020,
Published:2020
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YANG Lian-hong, ZHANG Bao-hua, GUO Fu-qiang, et al. Schottky β-Ga2O3 Solar-Blind UV Photodetectors[J]. Acta Electronica Sinica, 2020, 48(6): 1240-1243.
YANG Lian-hong, ZHANG Bao-hua, GUO Fu-qiang, et al. Schottky β-Ga2O3 Solar-Blind UV Photodetectors[J]. Acta Electronica Sinica, 2020, 48(6): 1240-1243. DOI: 10.3969/j.issn.0372-2112.2020.06.027.
本文制备并研究了肖特基型-Ga
2
O
3
日盲紫外光电探测器.结果表明:通过脉冲激光沉积外延生长的-Ga
2
O
3
的(-201)晶面 X射线衍射峰半高宽仅为36 arcsec,表现出了高的晶体质量;光暗条件下的I-V曲线显示所制备的器件具有明显的肖特基整流特性,在-5V偏压下暗电流保持在0.1nA量级,正向导通电压为1.5V;光电流谱显示器件在240nm处存在显著的峰值响应,并在260nm左右呈现陡峭的截止边,日盲紫外的带内带外抑制比达到1000.同时,也研究了不同掺杂对Ga
2
O
3
晶体质量的影响.
In this work
we fabricate and investigate the Schottky β-Ga
2
O
3
solar-blind UV photodetectors. The results show that full width at half maximum of the X-ray diffraction peak from (-201) plane of the β-Ga
2
O
3
grown by pulsed laser deposition is only 36 arcsec
indicating that the epitaxial β-Ga
2
O
3
has a high crystal quality. The fabricated Schottky diodes based on the β-Ga
2
O
3
exhibits obvious Schottky rectification characteristic
and the dark current maintains at 0.1 nA magnitude under -5 V bias voltage
and forward conduction voltage is 1.5 V. The photocurrent spectrum show that the device exhib
its remarkable peak response at 240 nm
a steep cutoff wavelength at 260 nm
and a rejection ratio of 1000 between in-band and out-band of solar-blind ultraviolet. Meantime
the effects of different dopants on the crystal quality of β-Ga
2
O
3
are also studied.
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