MAO Hui-bing, XING Pei-sheng, KE Jing-hua, et al. Response Study of the Micromechanical Modulator under Different Drive Conditions[J]. Acta Electronica Sinica, 2002, 30(2): 262-265.
MAO Hui-bing, XING Pei-sheng, KE Jing-hua, et al. Response Study of the Micromechanical Modulator under Different Drive Conditions[J]. Acta Electronica Sinica, 2002, 30(2): 262-265.DOI：
A new type of micromechanical optical modulator with a MARS structure is presented
which is fabricated by the surface micromechanical process.The measurement results show that the modulator has a series of resonant frequencies.When the modulator is drived by the sinusoidal signal
the response signal is also sinusoidal.However
when the modulator is drived by the square wave signal
the response signal depends on the driving frequency.If the frequency of the driving signal is far less than the resonant frequency
the modulator is drived by the up and down step signal: there is a damp vibration phenomenon.If the driving frequency is close to the resonant frequency
only the fundamental frequency part of the square wave has an effect: the modulator response is the sinusoidal signal.
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