1. 东南大学无线电工程系毫米波国家重点实验室,江苏,南京,210096
2. 南京电子技术研究所,江苏,南京,210013
3. 东南大学无线电工程系毫米波国家重点实验室江苏南京,210096
4. 南京电子技术研究所江苏南京,210013
纸质出版:2002
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严 伟, 洪 伟, 薛 羽. 低温共烧陶瓷微波多芯片组件[J]. 电子学报, 2002,30(5):711-714.
YAN Wei, HONG Wei, XUE Yu. LTCC Microwave Multichip Modules[J]. Acta Electronica Sinica, 2002, 30(5): 711-714.
低温共烧陶瓷(LTCC)是实现小型化、高可靠微波多芯片组件(MMCM)的一种理想的组装技术.本文研究采用了一种三维LTCC微波传输结构
并采用叠层通孔实现垂直微波互连.利用电磁场分析软件对三维微波传输结构和垂直微波互连方式进行了模拟和优化
并与试验样品的测试结果进行了对比
两者吻合较好.介绍了单片微波集成电路芯片测试和微波多芯片组件键合互连方法
以及一个X波段微波多芯片组件的应用实例.
Low Temperature Co-fired Ceramics(LTCC) is an excellent packaging technique for achieving highly reliable and miniature microwave multichip modules(MMCM).A three dimensional(3D) LTCC microwave transmission structure was studied in this paper
and stacked vias were applied in the structure to realize vertical microwave interconnecting.The 3D LTCC structure and the way of vertical interconnecting were simulated and optimized by the electromagnetic field analysis software.Good agreement was acquired between the simulated results and the experimental results.The testing of monolithic microwave integrated circuit(MMIC) chips and the bonding interconnecting technique for MMCM were described
and an application example of X-band MMCM was introduced.
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