This paper extends PEEC method for fast-accurate electromagnetic analysis of RF-MEMS spiral inductors.By introducing electrical boundary conditions into PEEC

the capacitance matrix is extended to include 3D-substrate coupling.With equivalent of charges in interface

Green functions in uniform dielectric regions can be used in calculation.By using proper mesh size and considering retardation times

the precision of PEEC can be maintained even in tough cases.These improvements reduce the analysis complexity and calculation time.The numeric results show good agreement with published measurement data.