An algorithm using the complex imaging method is presented in this paper to calculate the effective inductances of RF CMOS spiral inductors

with the effect of eddy currents inside the conductive substrate taken into consideration.The basic idea is to view the distributed eddy currents as a lumped image of the source current flowing in the inductor's windings

except that the position of the image is a complex number.After constructing a PEEC(partial equivalent element circuit) with the partial capacitance and inductance matrices extracted

the AC port-parameters of the inductor can then be computed.The accuracy of the completed program based on the above algorithm

called SCAPE

has been verified through a number of examples and comparisons with popular softwares such as ASITIC from UC Berkeley and Momentum in Agilent's ADS.There is an apparent speed advantage with our program.