Because of large amount of stochastic and uncertain factors in semiconductor wafer fabrication (SWF)

we often meet with all kinds of disruptions which make the former optimal scheduling scheme lose superiority.Considering the advantage of the fuzzy Petri-net (FPN) on the knowledge expression and logical reasoning

a releasing control policy for SWF based on FPN is proposed.According to the releasing FPN –reasoning model and the real-time data collected from the line

the control method can help to take the feasible releasing action to adopted to different conditions.With the releasing strategy

the throughput of the wafer fabrication can be maximized and the system can be optimized to a large extent.Finally

the effectiveness of this proposed method is confirmed by simulation.