The quality factor (Q) of 10

5

for laterally driven comb-shape micro-resonator can be achieved in vacuum chamber. But

Q could fall off to even much lower than 10

2

when the micro-resonator is exposed in atmosphere. For the sake of getting accurate evaluation of Q for the micro-resonator

the Coutte-type model and Stocks-type model were used to estimate the slide-film damping energy dissipation of micro-resonator.The results reveal that the average discrepancies have been reduced to below 7%.And in electronics

the damping of micro-resonator is equivalent to resistance of circuit

which would influence the electrical transfer function directly. So

a lumped-parameter electrical equivalent circuit is developed.The influence of slide damping on transfer function is then studied

. The result is helpful to design micro-resonator to some extent.