一种新型的Pt-NiO混合敏感膜全固态 溶解CO<sub>2</sub>传感器及其特性测量

岳 钊; 牛文成; 谢林宏; 权伍明; 罗

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一种新型的Pt-NiO混合敏感膜全固态溶解CO₂传感器及其特性测量

论文 | 更新时间：2025-07-16

- 一种新型的Pt-NiO混合敏感膜全固态溶解CO₂传感器及其特性测量
- A Novel All-Solid-State Dissolved CO₂ Sensor with Pt-NiO Mixed Sensing Film and Measurements of the Sensor’s Characteristics
- 电子学报 2007年35卷第5期页码：912-915
- 作者机构：
  
  南开大学信息技术科学学院微电子系,天津,300071
- 作者简介：
- 基金信息：
  
  国家自然科学基金 (No.69476036);天津市自然科学基金 (No.941407007)
- DOI：
  中图分类号： TN453
- 纸质出版：2007
- 稿件说明：
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岳钊, 牛文成, 谢林宏, 等. 一种新型的Pt-NiO混合敏感膜全固态溶解CO₂传感器及其特性测量[J]. 电子学报, 2007,35(5):912-915.

YUE Zhao, NIU Wen-cheng, XIE Lin-hong, et al. A Novel All-Solid-State Dissolved CO₂ Sensor with Pt-NiO Mixed Sensing Film and Measurements of the Sensor’s Characteristics[J]. Acta Electronica Sinica, 2007, 35(5): 912-915.
岳钊, 牛文成, 谢林宏, 等. 一种新型的Pt-NiO混合敏感膜全固态溶解CO₂传感器及其特性测量[J]. 电子学报, 2007,35(5):912-915. DOI：

YUE Zhao, NIU Wen-cheng, XIE Lin-hong, et al. A Novel All-Solid-State Dissolved CO₂ Sensor with Pt-NiO Mixed Sensing Film and Measurements of the Sensor’s Characteristics[J]. Acta Electronica Sinica, 2007, 35(5): 912-915. DOI：

摘要

为了方便的测量溶解二氧化碳(CO

)

利用室温下NiO对CO

的敏感特性

基于碳糊成膜方法

研制了一种新型全固态溶解CO

传感器.文章中

分析了传感器的结构和NiO敏感膜对CO

的敏感机理

测量了不同工作点和不同温度下传感器输出电压Δ

随着溶解CO

浓度变化的响应特性.实验结果显示

基于MISFET结构的Pt-NiO混合敏感膜溶解CO

传感器可以在室温下方便的检测溶解CO

浓度.

Abstract

To measure the concentration of dissolved carbon dioxide

using the material NiO which is sensing to CO

at room temperature

a novel all-solid-state dissolved CO

sensor was developed based on the carbon-paste film forming.In this paper

the sensor structure and the sensing mechanism of NiO to CO

were discussed.And the response characteristics of Δ

(the reference voltage shift) versus the dissolved CO

concentration which were bound at different biases and different temperatures were given.The experimental results show that the dissolved carbon sensor based on the MISFET structure with Pt-NiO mixed sensing film is feasible to determine the concentration

of dissolved CO

at room temperature.

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一种新型的Pt-NiO混合敏感膜全固态 溶解CO2传感器及其特性测量

A Novel All-Solid-State Dissolved CO2 Sensor with Pt-NiO Mixed Sensing Film and Measurements of the Sensor’s Characteristics

DOI：

摘要

Abstract

关键词

Keywords

references

一种新型的Pt-NiO混合敏感膜全固态溶解CO₂传感器及其特性测量

A Novel All-Solid-State Dissolved CO₂ Sensor with Pt-NiO Mixed Sensing Film and Measurements of the Sensor’s Characteristics