The insertion of dummy metals is necessary to reduce the pattern-dependent variations of the dielectric thickness in the CMP process.This makes conventional tools of capacitance extraction exhibit prohibitive calculation time.This paper presents an efficient method for 3-D capacitance extraction with taking the floating dummies into account.Based on the QMM-accelerated BEM

our method inherits high computational speed while considering the floating conditions and using a new preconditioner.While preserving high accuracy

our method shows an excellent speed with 1000x speed-up over Raphael

about 10x speed-up over the method in Ref.[5].Finally

we carried out a series of experiments on cases which contain floating dummy-fills.The influence of dummy-filling on interconnect capacitance is analyzed and conclusions are drawn to benefit the design of high performance integrated circuits.