Mu Chongjun, Chen Ergang, Gao Jun, et al. Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System[J]. Acta Electronica Sinica, 1999, (8).
Mu Chongjun, Chen Ergang, Gao Jun, et al. Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System[J]. Acta Electronica Sinica, 1999, (8).DOI：
Fifth order geometrical aberrations of rotationally symmetric electron optical system are divided into six types according to boundary condition.They are spherical aberration
coma
sub field curvature and astigmatism
sub coma
field curvature and astigmatism and distortion.Analyses for every type’s scattering pattern in Gaussian image plane are also given in detail.
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