The situation of non uniform material may often appear when we extract VLSI layout parameters using Boundary Element Method （BEM）.It is difficult to deal with this problem by using traditional region division method of BEM.Particularly if there is lot of material in the region concerned

the advantages of BEM such as simplicity

convenience and rapidity will be weakened.In this paper the authors present a distributed algorithm for region division problem of BEM.The algorithm is implemented in a distributed system consisting of 3 Workstations to extract VLSI layout parameters.The results obtained show that the calculating time of this distributed algorithm is less than that of traditional methods.This demonstrates that the algorithm can speed up the calculation and is characterized by parallel operation and high efficiency.