1. 浙江大学信息与电子工程学系!杭州
2. 310027
纸质出版:1998
移动端阅览
[1]何国鸿,陈抗生.压电振动微机械陀螺研究[J].电子学报,1998(11):65-68+64.
何国鸿, 陈抗生. The Study of Piezoelectric Micromachined Gyroscope[J]. Acta Electronica Sinica, 1998, (11): 65-68.
本文介绍了一种新型的压电振动微机械陀螺与其它大多数压电陀螺不同,它不需要弹性元件,由压电材料本身构成振子完成陀螺功能由PZT薄膜材料做成的平板沿厚度方向极化并受电激励产生厚度伸缩振动,当一输入角速度作用于振子;根据哥氏效应,则在极化轴和输入角速度轴组成的平面垂直方向上产生一正比于输入角速度大小的感应电压.它是一种双轴陀螺本文结出了它的物理模型,并用PZT陶瓷晶体做了宏观模拟实验.实验结果与理论计算一致文章还对由PZT薄膜构成的微机械压电陀螺进行了性能估算.
A novel piezoelectric plate vibration micromachined gyroscope has been proposed in this paper. Differentiating from many piezolectric gyroscopes
it is based on a piezoelectric plate without theuse of any other elastic element. The pienzoelectric plate is excited in the polarization direction to produce thickness extension vibration mace. If there is an input rotation rate on the vibrator
an induced voltage proportional to the angular rate will be produced in the direction perpendicular to the plane composed by the polarization axis and the input angular rate axis according to the Coriolis effect. It can sense two-axis rotation rate. In this paper
the fundamental theory of this piezolectric micro gyroscope is presented. A maero stimulation experiment is described. It is shown that the experimental results are close to the theoretical predictions. borne calculating results of a given micromechanical gyroscope made of PZT film are given.
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