A novel method based on convergence acceleration of the dielectric Green’s function by Pade approximation is presented for the first time to calculate the capacitance matrix of interconnection lines embedded in multilayered dielectric media. In our approach

the segmentation is kept on the conductor surfaces so as to reduce the scale of unknowns and the dielectric Green’s functions converge very fast since Pads approximations are employed.The new method demonstrates improved computational efficiency due to the above stated advantages. The computed results show good agreement with those presented in previous publications.