Based on doubol-layer dielectric measurements

a new techniqUe for measuring the complex permittivity of thin-film materials by means of an open resonator

in which the multilayer films are folded together and pressed with a heavy flat sample whose dielectric property is wen known to eliminate air gaps and flatten warped materials

is presented in this paper. The theoretical formulae are derived and the literature errors corrected. Applying the simply equipped length-varying method

measurements on several thin films were carried out and satisfactory results were achieved.