北京市半导体器件研究所
纸质出版:1987
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[1]何维华.双极晶体管hFE和BV_(ceo)工艺可控性的研究[J].电子学报,1987(06):89-93.
He Wui-hua. Study on Process controllability for hFE and BVceoof Bipolar Transistor[J]. Acta Electronica Sinica, 1987, (6): 89-93.
本文对双极晶体管制作中如何有效地控制好h
FE
和BV
c60
的条件作了较详细的工艺实验
并导出其必要条件为Δσ
i
°≥Δσ
i
然后通过扩散规律及器件结构功能的分析
探讨提高h
FE
和BV
c60
工艺可控性的工艺方法与控制途径。
In this paper
more detailed technological experiments are discussed for determining conditions under which hFB and BVcao can be effectively controlled during fabrication of bipolar transistor
and it is deduced that the prerequisite is △σi>>△σi Then the processing methods and controlling ways for improving process controllability of hFE and BVcao are searched through the analysis o( the diffusion law and functions of the device construction.
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