The invention of the junction transistor was the result of the combination of the progress in solid state physics with advanced techniques. The possibility of making trans’stor. resistor and capacitor in the same process led to the invention of IC’s.Yield improvement contributed to the success of LSI

VLSI is progressing very rapidly as a result of innovations in chip design and technology. The short channel effect

power density and interconnect resistance reduction. ≤1μm lithography

low temperature process （below 800℃） and high integration package will be critical for further development.