北京电子管厂
纸质出版:1983
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[1]苏里曼.自掩蔽结构的GaAs异质结双极型微波晶体管[J].电子学报,1983(05):38-42.
Su Li-man. Self-Alignment Structure for Npn GaAs Heterojunction Microwave Bipolar Transistors[J]. Acta Electronica Sinica, 1983, (5): 38-42.
本文提出了一种新型结构的Npn砷化镓双极型微波晶体管
该结构用一个两层的镓铝砷(Ga
0.4
Al
0.6
As/Ga
0.7
Al
0.3
As)来代替正常的单层作宽发射极用的镓铝砷(Ga
0.7
Al
0.3
As)。双发射极结构中的低铝(30%)层紧靠着基区
起宽发射极作用
保持了发射极异质结的良好匹配
并使管子的开启电压Von较小。高铝(60%)层和n
+
GaAs顶层相配合
成为一个工艺上易控的选择性腐蚀系统
形成了自掩蔽结构。该结构使晶体管的结面减小
工艺简化
且取得良好的性能。
A new structure for Npn GaAs heterojunction microwave bipolar transistor is proposed in this paper. The main feature of the structure is the adoption of a two layer n Ga
0.4
Al
0.6
As/Ga
0.7
Al
0.3
As double emitter instead of the normally used one layer n Ga
0.7
Al
0.3
As wide gap emitter. The layer of the low Al composition
acting as the wide gap emitter
is adjacent to the base resulting in a close matched heterojunction of the emitter and a low turn on voltage on the I-V characteristic of the transistor. The layer of the high Al composition and n
+
GaAs cap layer form a system which can be easily controlled for selective etching by hot HCl. Therefore
the self alignment structure can be obtained. This structure not only reduces the dimensions of the transistor
but also simplifies the processing of the transistor remarkably while ensuring very good characteristics (f
T
=4.6GHz
f
mag
=3.7GHz).
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