Based on the laser oscillation requirements

this paper discusses the condition for increasing pulse-width of excimer laser. In principle

CW operation of excimer laser can be obtained. For example

if dc discharge current density J≥5A/cm2

the XeF* excimer laser can produce CW output. But

under this discharge level

arc discharge is likely to occur and as a result of arc discharge

laser oscillation will be interrupted. The problem may be solved if an electron beam source is used. However

it is rather difficult now to make high power electron beam soure.