MEMS/NEMS (Micro/Nano Electro-Mechanical Systems) technology

as a mature microstructure manufacturing technology

can realize the mass production and integration of silicon-based nano-scale sensor devices. Moreover

it's easy to achieve small

light

and high performance miniature sensor and its test system. Biosensing technology can transform biological reaction signals into photoelectric signals. Compared with other biosensors

MEMS/NEMS-based biosensors have higher sensitivity

shorter response time

and stronger detection performance

which provide powerful support for automated high-throughput medical diagnosis. This paper focuses on the common device types of MEMS/NEMS-based biosensors and their manufacturing technology

materials

sensing mechanism

classification

and sensing limitation. By reviewing MEMS/NEMS biosensors and their research progress

the key technical difficulties and priorities of MEMS/NEMS biosensor are summarized. Finally

we discuss the future development prospects and existing challenges of MEMS/NEMS-based biological sensing technology.