面向医疗微系统应用的基于引线键合仪的碳纳米管转移集成工艺方法
Transfer and Integration of Carbon Nanotubes Using a Wire Bonder for Application in Medical Microsystems
- 电子学报 2022年50卷第4期 页码：984-989
- 作者机构：
军事科学院国防科技创新研究院前沿交叉技术研究中心，北京 100071
- 作者简介：
[ "王晓晶 男，1990年出生，河北保定人.助理研究员.主要从事微纳米系统技术方面的研究.E-mail: wang_xiaojing90@163.com" ]
[ "罗晓亮 男，1986年出生，福建龙岩人.副研究员.主要从事智能检测方面的研究." ]
- 基金信息：
DOI：10.12263/DZXB.20211001
中图分类号： TN14;TN30收稿：2021-07-29，
修回：2022-01-24，
纸质出版：2022-04-25
- 稿件说明：
移动端阅览
王晓晶,罗晓亮,王浩旭等.面向医疗微系统应用的基于引线键合仪的碳纳米管转移集成工艺方法[J].电子学报,2022,50(04):984-989.
WANG Xiao-jing,LUO Xiao-liang,WANG Hao-xu,et al.Transfer and Integration of Carbon Nanotubes Using a Wire Bonder for Application in Medical Microsystems[J].ACTA ELECTRONICA SINICA,2022,50(04):984-989.
王晓晶,罗晓亮,王浩旭等.面向医疗微系统应用的基于引线键合仪的碳纳米管转移集成工艺方法[J].电子学报,2022,50(04):984-989. DOI： 10.12263/DZXB.20211001.
WANG Xiao-jing,LUO Xiao-liang,WANG Hao-xu,et al.Transfer and Integration of Carbon Nanotubes Using a Wire Bonder for Application in Medical Microsystems[J].ACTA ELECTRONICA SINICA,2022,50(04):984-989. DOI： 10.12263/DZXB.20211001.
摘要
本文提出了一种利用标准引线键合仪实现碳纳米管材料转移的异质集成工艺方法，并初步验证了其应用于制备微型X射线源器件阴极的可行性.所提出的碳纳米管异质集成方法基于标准的球焊-楔焊（ball bond-stitch bond）工艺流程，可将碳纳米管从其常规生长基底转移至球焊过程生成的金属球上，并最终共同转移集成至目标器件基底上.测试结果表明，该方法可将厚度为
<math id="M1"><mn mathvariant="normal">20</mn><mo>~</mo><mn mathvariant="normal">110</mn><mtext> </mtext><mi mathvariant="normal">n</mi><mi mathvariant="normal">m</mi></math>
http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39122270&type=
http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39122265&type=
14.39333248
2.37066650
、直径为
<math id="M2"><mn mathvariant="normal">20</mn><mo>~</mo><mn mathvariant="normal">100</mn><mtext> </mtext><mi mathvariant="normal">µ</mi><mi mathvariant="normal">m</mi></math>
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http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39122275&type=
14.56266594
2.96333337
的碳纳米管圆形薄膜转移至外径仅为
<math id="M3"><mn mathvariant="normal">750</mn><mtext> </mtext><mi mathvariant="normal">µ</mi><mi mathvariant="normal">m</mi></math>
http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39122292&type=
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9.73666668
2.96333337
的石英管端面内，有望作为微型X射线源等医疗微器件的场发射阴极端.本文提出的方法可实现碳纳米管向亚毫米尺寸管材基底的规模化转移集成，可为进一步缩小电控微型X射线源或电子源尺寸提供方案借鉴.
Abstract
A method for transfer and integration of carbon nanotubes(CNTs) using a standard wire bonder is presented
and its potential application in producing cathodes of miniaturized X-ray sources is evaluated. The proposed method is based on standard ball bond-stitch bond processes
which realizes the transfer of CNTs from the growth substrates onto gold(Au) balls formed during the ball bond process
and ultimately the integration of CNTs together with Au balls onto target substrates. Experimental results show that the proposed method can transfer 20-110 nm thick
20-100 μm diameter CNT patches onto the end surfaces of 750 μm diameter quartz tubes
which can be used as field emission(FE) cathodes for miniaturized X-ray sources in medical microsystems. The reported method enables scalable transfer and integration of CNTs onto submillimeter-sized tube-shaped substrates
thus providing a promising method for minimizing the dimensions of electronically controlled X-ray sources and electron sources.
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Keywords
references
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