硅基亚波长光栅波导在微波光子学中的应用
Subwavelength Grating Waveguide for Microwave Photonic Applications
- 电子学报 2022年50卷第9期 页码：2233-2241
- 作者机构：
1.东南大学光传感通信综合网络国家地方联合工程研究中心，江苏南京 210096
2.麦吉尔大学电子工程系，加拿大蒙特利尔 H3A 0E9
- 作者简介：
[ "王俊嘉 男，1987年出生，江苏南京人.东南大学研究员，博士生导师.主要研究方向为光子集成.E-mail: junjia_wang@seu.edu.cn" ]
[ "房崇宝 男，1996年出生，江苏扬州人.东南大学电子科学与工程学院硕士研究生.主要研究方向为电光调制器等." ]
- 基金信息：国家重点研发计划(2019YFB2205303);江苏省自然科学基金(BK20210207);中央高校基本科研业务费专项资金(2242021k30007;2242021R10015)
DOI：10.12263/DZXB.20220090
中图分类号： TN256;TN252收稿：2022-01-17，
修回：2022-04-12，
纸质出版：2022-09-25
- 稿件说明：
移动端阅览
王俊嘉,房崇宝,Lawrence R Chen.硅基亚波长光栅波导在微波光子学中的应用[J].电子学报,2022,50(09):2233-2241.
WANG Jun-jia,FANG Chong-bao,R CHEN Lawrence.Subwavelength Grating Waveguide for Microwave Photonic Applications[J].ACTA ELECTRONICA SINICA,2022,50(09):2233-2241.
王俊嘉,房崇宝,Lawrence R Chen.硅基亚波长光栅波导在微波光子学中的应用[J].电子学报,2022,50(09):2233-2241. DOI： 10.12263/DZXB.20220090.
WANG Jun-jia,FANG Chong-bao,R CHEN Lawrence.Subwavelength Grating Waveguide for Microwave Photonic Applications[J].ACTA ELECTRONICA SINICA,2022,50(09):2233-2241. DOI： 10.12263/DZXB.20220090.
摘要
为了满足集成微波光子学的发展需要，随着硅基光子学的发展，硅基亚波长光栅波导被提出并受到关注.硅基亚波长光栅具备灵活度高、折射率可调等特性，主要用于实现光学滤波器、调制器、延迟线等集成微波光子学组件.本文对这类器件进行举例与讨论，并且在结尾提出对硅基亚波长光栅波导在集成微波光子学中应用的展望.
Abstract
In order to meet the increasing integration demand from integrated microwave photonics
the devices based on subwavelength grating waveguide is proposed and studied. The subwavelength grating waveguide is mainly used in filters and optical delay lines in integrated microwave photonics
with design freedom in refractive index. We review and discuss the developments of these applications
and provide the outlook on the application of the subwavelength grating waveguide devices in integrated microwave photonics at the end.
关键词
Keywords
references
CAPMANY J , NOVAK D . Microwave photonics combines two worlds [J]. Nature Photonics , 2007 , 1 ( 6 ): 319 - 330 .
SEEDS A J , WILLIAMS K J . Microwave photonics [J]. Journal of Lightwave Technology , 2006 , 24 ( 12 ): 4628 - 4641 .
IEZEKIEL S , BURLA M , KLAMKIN J , et al . RF engineering meets optoelectronics: Progress in integrated microwave photonics [J]. IEEE Microwave Magazine , 2015 , 16 ( 8 ): 28 - 45 .
MARPAUNG D , YAO J , CAPMANY J . Integrated microwave photonics [J]. Nature Photonics , 2019 , 13 ( 2 ): 80 - 90 .
SHAN W , LU L , WANG X , et al . Broadband continuously tunable microwave photonic delay line based on cascaded silicon microrings [J]. Optics Express , 2021 , 29 ( 3 ): 3375 - 3385 .
CHEW S X , HUANG D , LI L , et al . Integrated microwave photonic phase shifter with full tunable phase shifting range (>360°) and RF power equalization [J]. Optics Express , 2019 , 27 ( 10 ): 14798 - 14808 .
MCKAY L , MERKLEIN M , LIU Y , et al . Integrated microwave photonic true-time delay with interferometric delay enhancement based on Brillouin scattering and microring resonators [J]. Optics Express , 2020 , 28 ( 24 ): 36020 - 36032 .
FAN Z Q , ZHANG W F , QIU Q , et al . Hybrid frequency-tunable parity-time symmetric optoelectronic oscillator [J]. Journal of Lightwave Technology , 2020 , 38 ( 8 ): 2127 - 2133 .
ZHU N , LIU S , LIU H , et al . A novel microwave photonic filter for frequency-tripled signals [C]// 2020 Asia Communications and Photonics Conference(ACP) and International Conference on Information Photonics and Optical Communications(IPOC) . Beijing : IEEE , 2020 : DOI: 10.1364/ACPC.2020.M4A.348 http://dx.doi.org/10.1364/ACPC.2020.M4A.348 .
ZHANG W F , YAO J P . Photonic integrated field-programmable disk array signal processor [J]. Nature Communications , 2020 , 11 ( 1 ): 406 .
WANG J , GLESK I , CHEN L R . Subwavelength grating filtering devices [J]. Optics Express , 2014 , 22 ( 13 ): 15335 - 15345 .
CHEN X , TSANG H K . Polarization-independent grating couplers for silicon-on-insulator nanophotonic waveguides [J]. Optics Letters , 2011 , 36 ( 6 ): 796 - 798 .
BOCK P , CHEBEN P , SCHMID J , et al . Subwavelength grating periodic structures in silicon-on-insulator: A new type of microphotonic waveguide [J]. Optics Express , 2010 , 18 ( 19 ): 20251 - 20262 .
XU X C , SUBBARAMAN H , COVEY J , et al . Complementary metal-oxide-semiconductor compatible high efficiency subwavelength grating couplers for silicon integrated photonics [J]. Applied Physics Letters , 2012 , 101 ( 3 ): 031109 .
QI F , MA Q , WANG Y , et al . Large-aperture subwavelength grating couplers [J]. Applied Optics , 2016 , 55 ( 11 ): 2960 - 2966 .
DONZELLA V , SHERWALI A , FLUECKIGER J , et al . Sub-wavelength grating components for integrated optics applications on SOI chips [J]. Optics Express , 2014 , 22 ( 17 ): 21037 - 21050 .
ORTEGA-MONUX A , CTYROKY J , CHEBEN P , et al . Disorder effects in subwavelength grating metamaterial waveguides [J]. Optics Express , 2017 , 25 ( 11 ): 12222 - 12236 .
DONZELLA V , SHERWALI A , FLUECKIGER J , et al . Design and fabrication of SOI micro-ring resonators based on sub-wavelength grating waveguides [J]. Optics Express , 2015 , 23 ( 4 ): 4791 - 4803 .
FLUECKIGER J , SCHMIDT S , DONZELLA V , et al . Sub-wavelength grating for enhanced ring resonator biosensor [J]. Optics Express , 2016 , 24 ( 14 ): 15672 - 15686 .
WANG Z , XU X , FAN D , et al . Geometrical tuning art for entirely subwavelength grating waveguide based integrated photonics circuits [J]. Scientific Reports , 2016 , 6 ( 1 ): 24106 .
MALPUECH G , KAVOKIN A , PANZARINI G , et al . Theory of photon Bloch oscillations in photonic crystals [J]. Physical Review B , 2001 , 63 ( 3 ): 035108 .
RUAN Z S , SHEN L , ZHENG S , et al . Subwavelength grating slot(SWGS) waveguide on silicon platform [J]. Optics Express , 2017 , 25 ( 15 ): 18250 - 18264 .
WANG Y , SHI W , WANG X , et al . Design of broadband subwavelength grating couplers with low back reflection [J]. Optics Letters , 2015 , 40 ( 20 ): 4647 - 4650 .
YUN H , WANG Y , ZHANG F , et al . Broadband 2×2 adiabatic 3dB coupler using silicon-on-insulator sub-wavelength grating waveguides [J]. Optics Letters , 2016 , 41 ( 13 ): 3041 - 3044 .
LIU L , DENG Q , ZHOU Z . Subwavelength-grating-assisted broadband polarization-independent directional coupler [J]. Optics Letters , 2016 , 41 ( 7 ): 1648 - 1651 .
XU Y , XIAO J . Ultracompact and high efficient silicon-based polarization splitter-rotator using a partially-etched subwavelength grating coupler [J]. Scientific Reports , 2016 , 6 ( 1 ): 27949 .
XIONG Y , XU D X , SCHMID J H , et al . High extinction ratio and broadband silicon TE-pass polarizer using subwavelength grating index engineering [J]. IEEE Photonics Journal , 2015 , 7 ( 5 ): 1 - 7 .
WANG J , GLESK I , CHEN L R . Subwavelength grating Bragg grating filters in silicon-on-insulator [J]. Electronics Letters , 2015 , 51 ( 9 ): 712 - 714 .
LIU W N , CHEN R , SHI W Y , et al . Narrow-frequency sharp-angular filters using all-dielectric cascaded meta-gratings [J]. Nanophotonics , 2020 , 9 ( 10 ): 3443 - 3450 .
WANG J , ASHRAFI R , ADAMS R , et al . Subwavelength grating enabled on-chip ultra-compact optical true time delay line [J]. Scientific Reports 2016 , 6 : 30235 .
CHUNG C J , XU X C , WANG G C , et al . On-chip optical true time delay lines featuring one-dimensional fishbone photonic crystal waveguide [J]. Applied Physics Letters , 2018 , 112 ( 7 ): 071104 .
ALMEIDA V R , PANEPUCCI R R , LIPSON M . Nanotaper for compact mode conversion [J]. Optics Letters , 2003 , 28 ( 15 ): 1302 - 1304 .
CHEBEN P , SCHMID J , WANG S R , et al . Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency [J]. Optics Express , 2015 , 23 ( 17 ): 22553 - 22563 .
KUO P C , TONG Y , CHOW C W , et al . 4 . 36 Tbit/s silicon chip-to-chip transmission via few-mode fiber(FMF) using 2D sub-wavelength grating couplers [C]// 2021 Optical Fiber Communication Conference(OFC) . San Francisco : IEEE , 2021: DOI: 10.1364/OFC.2021.M3D.6 http://dx.doi.org/10.1364/OFC.2021.M3D.6 .
CHENG L , MAO S , WANG Y , et al . Fiber-chip bi-wavelength multiplexing with subwavelength single-etch grating coupler and diplexer [J]. IEEE Photonics Journal , 2022 , 14 ( 1 ): 1 - 6 .
PAN Z Y , XU X C , CHUNG C J , et al . High-speed modulator based on electro-optic polymer infiltrated subwavelength grating waveguide ring resonator [C]// Proceedings Volume 10538 , Optical Interconnects XVIII . San Francisco : SPIE OPTO , 2018 : 179 .
RAJPUT S , KAUSHIK V , BABU P , et al . Optical modulation via coupling of distributed semiconductor heterojunctions in a Si-ITO-based subwavelength grating [J]. Physical Review Applied , 2021 , 15 ( 5 ): 054029 .
RYTOV S M . Electromagnetic properties of a finely stratified medium [J]. Sovphysjept Engltransl , 1956 , 2 ( 3 ): 466 - 475 .
CHEBEN P , HALIR R , SCHMID J H , et al . Subwavelength integrated photonics [J]. Nature , 2018 , 560 ( 7720 ): 565 - 572 .
LALANNE P , ASTILEAN S , CHAVEL P , et al . Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff [J]. Journal of The Optical Society of America A-optics Image Science and Vision , 1999 , 16 ( 5 ): 1143 - 1156 .
LALANNE P , CHAVEL P . Metalenses at visible wavelengths: Past, present, perspectives [J]. Laser & Photonics Reviews , 2017 , 11 ( 3 ): 1600295 .
HALIR R , ORTEGA-MONUX A , SCHMID J H , et al . Recent advances in silicon waveguide devices using sub-wavelength gratings [J]. IEEE Journal of Selected Topics in Quantum Electronics , 2014 , 20 ( 4 ): 279 - 291 .
HALIR R , BOCK P J , CHEBEN P , et al . Waveguide sub-wavelength structures: A review of principles and applications [J]. Laser & Photonics Reviews , 2015 , 9 ( 1 ): 25 - 49 .
KANG J , CHENG Z , ZHOU W , et al . Focusing subwavelength grating coupler for mid-infrared suspended membrane germanium waveguides [J]. Optics Letters , 2017 , 42 ( 11 ): 2094 - 2097 .
PENADES J S , ORTEGA-MONUX A , NEDELJKOVIC M , et al . Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding [J]. Optics Express , 2016 , 24 ( 20 ): 22908 - 22916 .
CHEN L R . Subwavelength grating waveguide devices in silicon-on-insulators for integrated microwave photonics(Invited Paper) [J]. Chinese Optics Letters , 2017 , 15 ( 1 ): 10004 - 10008 .
GAO G , LUO M , LI X , et al . Transmission of 2.86 Tb/s data stream in silicon subwavelength grating waveguides [J]. Optics Express , 2017 , 25 ( 3 ): 2918 - 2927 .
PEREIRA-MARTÍN D , LUQUE‐GONZÁLEZ J , WANG-ÜEMERT-PÉREZ J G , et al . Complex spectral filters in silicon waveguides based on cladding-modulated Bragg gratings [J]. Optics Express , 2021 , 29 ( 11 ): 15867 - 15881 .
LUAN E , YUN H , MA M , et al . Label-free biosensing with a multi-box sub-wavelength phase-shifted Bragg grating waveguide [J]. Biomed Optics Express , 2019 , 10 ( 9 ): 4825 - 4838 .
HEINSALU S , ISOGAI Y , KAWANO A , et al . Proposal and analysis of ultra-high amplitude-sensitive refractive index sensor by thick silicon multi-slot sub-wavelength Bragg grating waveguide [J]. Optics Communications , 2022 , 505 : 127533 .
WANG J J , GLESK I , CHEN L R . Subwavelength grating devices in silicon photonics [J]. Science Bulletin , 2016 , 61 ( 11 ): 879 - 888 .
WANG Z , XU X C , FAN D , et al . High quality factor subwavelength grating waveguide micro-ring resonator based on trapezoidal silicon Pillars [J]. Optics Letters , 2016 , 41 ( 14 ): 3375 - 3378 .
PAN Z Y , XU X C , CHUNG C J , et al . High-speed modulator based on electro-optic polymer infiltrated subwavelength grating waveguide ring resonator [J]. Laser & Photonics Reviews , 2018 , 12 ( 6 ): 1700300.1 - 1700300.6 .
CHEN L R , WANG J , NAGHDI B , et al . Subwavelength grating waveguide devices for telecommunications applications [J]. IEEE Journal of Selected Topics in Quantum Electronics , 2019 , 25 ( 3 ): 1 - 11 .
SUN H , WANG Y , CHEN L R . Integrated discretely tunable optical delay line based on step-chirped subwavelength grating waveguide Bragg gratings [J]. Journal of Lightwave Technology , 2020 , 38 ( 19 ): 5551 - 5560 .
WANG Y , SUN H , KHALIL M , et al . On-chip optical true time delay lines based on subwavelength grating waveguides [J]. Optics Letters , 2021 , 46 ( 6 ): 1405 - 1408 .
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