氮化铝Lamb波谐振器的能量损耗分析研究

赵继聪; 吕世涛; 张敖宇; 宋晨光; 孙海燕

doi:10.12263/DZXB.20220897

您当前的位置：

首页 >

文章列表页 >

氮化铝Lamb波谐振器的能量损耗分析研究

学术论文 | 更新时间：2025-07-02

- 氮化铝Lamb波谐振器的能量损耗分析研究
- Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators
- 电子学报 2023年51卷第1期页码：222-230
- 作者机构：
  
  1.南通大学江苏省专用集成电路设计重点实验室，江苏南通 226019
  2.南通大学信息科学技术学院，江苏南通 226019
  3.南通大学电气工程学院，江苏南通 226019
- 作者简介：
  
  [ "赵继聪男，1989年出生于江苏南通.2017年获中国科学院半导体研究所博士学位.现任南通大学江苏省专用集成电路设计重点实验室副教授.主要研究方向为射频MEMS谐振器件及微系统集成封装.E-mail: jczhao@ntu.edu.cn" ]
  [ "吕世涛男，1999年出生于安徽滁州.现为南通大学信息科学技术学院硕士研究生.主要研究方向为射频微纳谐振器件.E-mail: lst@stmail.ntu.edu.cn" ]
- 基金信息：
  
  国家自然科学基金(62174092;61804084)
- DOI：10.12263/DZXB.20220897
  中图分类号： TN4;TN712
- 收稿：2022-07-26，
  
  修回：2022-10-07，
  
  纸质出版：2023-01-25
- 稿件说明：
移动端阅览
赵继聪,吕世涛,张敖宇等.氮化铝Lamb波谐振器的能量损耗分析研究[J].电子学报,2023,51(01):222-230.

ZHAO Ji-cong,LÜ Shi-tao,ZHANG Ao-yu,et al.Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators[J].ACTA ELECTRONICA SINICA,2023,51(01):222-230.
赵继聪,吕世涛,张敖宇等.氮化铝Lamb波谐振器的能量损耗分析研究[J].电子学报,2023,51(01):222-230. DOI： 10.12263/DZXB.20220897.

ZHAO Ji-cong,LÜ Shi-tao,ZHANG Ao-yu,et al.Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators[J].ACTA ELECTRONICA SINICA,2023,51(01):222-230. DOI： 10.12263/DZXB.20220897.

摘要

本文介绍了工作频率为400 MHz和2 GHz氮化铝Lamb波谐振器的结构设计、微纳制造及测试表征，研究了锚点损耗和声子间相互作用损耗对Lamb波谐振器品质因数（

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704485&type=

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704484&type=

2.37066650

2.87866688

值）的影响，并分析了不同工作频率的Lamb波谐振器的主要能量损耗来源.研究发现：对于低频谐振器，锚点损耗为其主要能量损耗来源，因此减小支撑轴宽度可减少通过支撑轴泄漏至衬底的能量，进而提高

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704485&type=

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704484&type=

2.37066650

2.87866688

值；对于高频谐振器，声子间相互作用损耗为其主要能量损耗来源，因此相比于金（Au），采用铝（Al）作为叉指电极（IDT）材料的谐振器具有更高

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704485&type=

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704484&type=

2.37066650

2.87866688

值.针对Lamb波谐振器的结构特点，设计了一套基于七步光刻工艺的微纳制程，成功制备了具有微型化释放腔体的Lamb波谐振器，并具备优异的性能.测试结果表明，工作频率为400 MHz和2 GHz的Al-IDT谐振器的串联品质因数（

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704485&type=

http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=41704484&type=

2.37066650

2.87866688

）分别达到2 590和1 192.

Abstract

In this paper

the structural design

micro-nano fabrication and test characterization of AlN Lamb wave resonators with operating frequencies of 400 MHz and 2 GHz were studied. The effects of anchor loss and interaction loss between phonons on the quality factor (

value) of Lamb wave resonators were analyzed

and the main energy loss sources of Lamb wave resonators at different operating frequencies were clarified. The results show that for low-frequency resonators

the anchor loss is the main source of energy loss

so reducing the width of the support shaft can reduce the energy leaking to the substrate through the support shaft

thereby increasing the

value. For high-frequency resonators

the loss of interaction between phonons is the main source of energy loss

so the resonator using aluminum (Al) as the interdigital electrode (IDT) material has a higher

value than gold (Au). According to the structural characteristics of the designed Lamb wave resonators

a fabrication technology based on seven-step lithography process was designed

and the Lamb wave resonators with miniaturized release cavities were successfully fabricated with excellent performance. The test results show that the series quality factors (

) of Al-IDT resonators operating at 400 MHz and 2 GHz reach 2 590 and 1 192

respectively.

关键词

Keywords

references

张旭东 , 雷倩倩 , 张芳玲 , 等 . 3阶FLFB低通滤波器的最小可接受功耗分析 [J]. 电子学报 , 2022 , 50 ( 6 ): 1480 - 1486 .

ZHANG X D , LEI Q Q , ZHANG F L , et al . Analysis of minimum acceptable power consumption of the 3 rd follow-the-leader-feed back low pass filter [J]. Acta Electronica Sinica , 2022 , 50 ( 6 ): 1480 - 1486 . (in Chinese)

LE X H , SHI Q F , VACHON P , et al . Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era [J]. Journal of Micromechanics and Microengineering , 2022 , 32 ( 1 ): 014005 .

戴恩光 . 基于高Q值SAW谐振器的多点频微波频率源的研究 [J]. 电子学报 , 2000 , 28 ( 5 ): 133 - 135 .

DAI E G . Research on the mircrowake frequency synthesizer based upon high Q value SAW resonators [J]. Acta Electronica Sinica , 2000 , 28 ( 5 ): 133 - 135 . (in Chinese)

ZHAO Z N , QIAN Z H , YONG Y K . Frequency shift prediction of a shear mode multi-layered FBAR sensor in viscous media using transfer matrix method [J]. Applied Mathematical Modelling , 2021 , 99 : 555 - 565 .

FU J L , AYAZI F . High-Q AlN-on-silicon resonators with annexed platforms for portable integrated VOC sensing [J]. Journal of Microelectromechanical Systems , 2015 , 24 ( 2 ): 503 - 509 .

诸政 , 吕世涛 , 张敖宇 , 等 . 环形氮化铝压电MEMS谐振器的支撑结构设计研究 [J]. 传感器与微系统 , 2022 , 41 ( 3 ): 24 - 27, 35 .

ZHU Z , LÜ S T , ZHANG A Y , et al . Support structure design research of circular AlN piezoelectric MEMS resonator [J]. Transducer and Microsystem Technologies , 2022 , 41 ( 3 ): 24 - 27, 35 . (in Chinese)

SEGOVIA-FERNANDEZ J , PIAZZA G . Thermoelastic damping in the electrodes determines Q of AlN contour mode resonators [J]. Journal of Microelectromechanical Systems , 2017 , 26 ( 3 ): 550 - 558 .

HSU F C , HSU J C , HUANG T C , et al . Design of lossless anchors for microacoustic-wave resonators utilizing phononic crystal strips [J]. Applied Physics Letters , 2011 , 98 ( 14 ): 143505 .

HARRINGTON B P , ABDOLVAND R . In-plane acoustic reflectors for reducing effective anchor loss in lateral-extensional MEMS resonators [J]. Journal of Micromechanics and Microengineering , 2011 , 21 ( 8 ): 085021 .

LIN C M , LAI Y J , HSU J C , et al . High-Q aluminum nitride Lamb wave resonators with biconvex edges [J]. Applied Physics Letters , 2011 , 99 ( 14 ): 143501 .

SIDDIQI M W U , FEDELI P , TU C , et al . Numerical analysis of anchor loss and thermoelastic damping in piezoelectric AlN-on-Si Lamb wave resonators [J]. Journal of Micromechanics and Microengineering , 2019 , 29 ( 10 ): 105013 .

SCHAFFER Z A , COLOMBO L , KOCHHAR A S , et al . Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators [C]// 2018 IEEE Micro Electro Mechanical Systems . Belfast : IEEE , 2018 : 787 - 790 .

ZHU Y , WANG N , SUN C L , et al . A high coupling coefficient 2.3-GHz AlN resonator for high band LTE filtering application [J]. IEEE Electron Device Letters , 2016 , 37 ( 10 ): 1344 - 1346 .

MILLER J M L , ANSARI A , HEINZ D B , et al . Effective quality factor tuning mechanisms in micromechanical resonators [J]. Applied Physics Reviews , 2018 , 5 ( 4 ): 041307 .

RINALDI M , ZUNIGA C , PIAZZA G . 5-10 GHz AlN contour-mode nanoelectromechanical resonators [C]// 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems . Sorrento : IEEE , 2009 : 916 - 919 .

LUO T C , LIU Y , ZOU Y , et al . Design and optimization of the dual-mode lamb wave resonator and dual-passband filter [J]. Micromachines , 2022 , 13 ( 1 ): 87 .

LEE J E Y , YAN J Z , SESHIA A A . Study of lateral mode SOI-MEMS resonators for reduced anchor loss [J]. Journal of Micromechanics and Microengineering , 2011 , 21 ( 4 ): 045010 .

KHINE L , PALANIAPAN M . High-Qbulk-mode SOI square resonators with straight-beam anchors [J]. Journal of Micromechanics and Microengineering , 2009 , 19 ( 1 ): 015017 .

AKHIEZER A . On the absorption of sound in solids [J]. Journal of Physics-Ussr , 1939 , 1 ( 1 ): 289 - 298 .

TU C , LEE J E Y . Thermoelastic dissipation in etch-hole filled lamé bulk-mode silicon microresonators [J]. IEEE Electron Device Letters , 2012 , 33 ( 3 ): 450 - 452 .

DUWEL A , CANDLER R N , KENNY T W , et al . Engineering MEMS resonators with low thermoelastic damping [J]. Journal of Microelectromechanical Systems , 2006 , 15 ( 6 ): 1437 - 1445 .

CHEN Z J , WANG T Y , JIA Q Q , et al . A Novel Lamé Mode RF-MEMS resonator with high quality factor [J]. International Journal of Mechanical Sciences , 2021 , 204 : 106484 .

CASTILLA D , MUÑOZ M , SINUSÍA M , et al . Large asymmetry in the magnetoresistance loops of ferromagnetic nanostrips induced by Surface Acoustic Waves [J]. Scientific Reports , 2021 , 11 : 8586 .

SUN H Y , LV S T , ZHANG A Y , et al . High quality-factor and spectrum-clean AlN lamb-wave resonators with optimized lateral reflection boundary conditions and transducer design [J]. Micromachines , 2022 , 13 ( 5 ): 779 .

ZUO C J , SINHA N , VAN DER SPIEGEL J , et al . Multifrequency pierce oscillators based on piezoelectric AlN contour-mode MEMS technology [J]. Journal of Microelectromechanical Systems , 2010 , 19 ( 3 ): 570 - 580 .

BHUGRA H , PIAZZA G . Piezoelectric MEMS Resonators [M]. Cham : Springer International Publishing , 2017 .

ESTEVES G , YOUNG T R , TANG Z C , et al . Al0.68Sc0.32N Lamb wave resonators with electromechanical coupling coefficients near 10.28% [J]. Applied Physics Letters , 2021 , 118 ( 17 ): 171902 .

ZOU J , LIN C M , LAM C S , et al . Transducer design for AlN Lamb wave resonators [J]. Journal of Applied Physics , 2017 , 121 ( 15 ): 154502 .

CASSELLA C , SINGH N , SOON B W , et al . Quality factor dependence on the inactive regions in AlN contour-mode resonators [J]. Journal of Microelectromechanical Systems , 2015 , 24 ( 5 ): 1575 - 1582 .

BASSIRIAN P , MOODY J , LU R C , et al . Nanowatt-level wakeup receiver front ends using MEMS resonators for impedance transformation [J]. IEEE Transactions on Microwave Theory and Techniques , 2019 , 67 ( 4 ): 1615 - 1627 .

LU R C , MANZANEQUE T , BREEN M , et al . Piezoelectric RF resonant voltage amplifiers for IoT applications [C]// 2016 IEEE MTT-S International Microwave Symposium . San Francisco : IEEE , 2016 : 1 - 4 .

LI J C , CHEN Z J , LIU W L , et al . A novel piezoelectric RF-MEMS resonator with enhanced quality factor [J]. Journal of Micromechanics and Microengineering , 2022 , 32 ( 3 ): 035002 .

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

基于SRAM的光栅光调制器的控制扫描电路研究

一类新子波的稳定性和正交条件研究

考虑波导壁影响开放腔孔耦合品质因数的计算