基于GaN/Ti3C2Tx的TMA传感器气敏性能及其应用研究

韩丹; 洪宇涛; 刘志华; 段奇; 李栋辉; 王雨; 史杰旭; 桑胜波

doi:10.12263/DZXB.20231180

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基于GaN/Ti₃C₂T_x的TMA传感器气敏性能及其应用研究

学术论文 | 更新时间：2025-12-08

- 基于GaN/Ti₃C₂T_x的TMA传感器气敏性能及其应用研究
- Research on Gas Sensing Performance and Application of TMA Sensor Based on GaN/Ti₃C₂T_x
- 电子学报 2024年52卷第4期页码：1389-1398
- 作者机构：
  
  太原理工大学电子信息与光学工程学院，山西太原 030024
- 作者简介：
  
  [ "韩丹女，1988年10月生，山西吕梁人.现为太原理工大学电子信息与光学工程学院副教授、硕士生导师.研究方向为半导体材料制备及其气体传感器方向.E-mail: hd06520101@163.com" ]
  [ "洪宇涛男，2000年6月生，山西太原人.现为太原理工大学电子信息与光学工程学院硕士研究生.研究方向为半导体材料制备及其气体传感器.E-mail: hyt15303418298@163.com" ]
  [ "桑胜波男，1979年4月生，山东菏泽人.现为太原理工大学教授、博士生导师.研究方向为传感与集成测试系统.E-mail: sunboa-sang@tyut.edu.cn" ]
- 基金信息：
  
  国家自然科学基金(52375572;62031022);山西省重点研发计划项目(202102030201003);山西省水利科学技术研究推广项目(2023GM16);山西浙大新材料与化工研究院研发项目(2022SX-AT001)
- DOI：10.12263/DZXB.20231180
  中图分类号： TP212;
- 收稿：2023-12-21，
  
  修回：2024-03-07，
  
  纸质出版：2024-04-25
- 稿件说明：
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韩丹, 洪宇涛, 刘志华, 等. 基于GaN/Ti₃C₂T_x的TMA传感器气敏性能及其应用研究[J]. 电子学报, 2024, 52(04): 1389-1398.

HAN Dan, HONG Yu-tao, LIU Zhi-hua, et al. Research on Gas Sensing Performance and Application of TMA Sensor Based on GaN/Ti₃C₂T_x[J]. Acta Electronica Sinica, 2024, 52(04): 1389-1398.
韩丹, 洪宇涛, 刘志华, 等. 基于GaN/Ti₃C₂T_x的TMA传感器气敏性能及其应用研究[J]. 电子学报, 2024, 52(04): 1389-1398. DOI：10.12263/DZXB.20231180

HAN Dan, HONG Yu-tao, LIU Zhi-hua, et al. Research on Gas Sensing Performance and Application of TMA Sensor Based on GaN/Ti₃C₂T_x[J]. Acta Electronica Sinica, 2024, 52(04): 1389-1398. DOI：10.12263/DZXB.20231180

摘要

本文联合溶剂热法和氮化法合成氮化镓（GaN）/Ti

新型复合材料，并研究了基于GaN/Ti

新型复合材料的气体传感器对三甲胺（Trimethylamine，TMA）气体的传感特性.通过一系列表征手段分析了复合材料的形貌以及元素组成特性，证实了GaN与Ti

材料的成功复合.传感器对TMA气体的气敏特性结果表明，GaN/Ti

传感器在室温下能够高效检测1~200 ppm的TMA气体，且与纯GaN传感器相比，对TMA的检测下限由10 ppm降低至1 ppm.此外，复合传感器气敏结果进一步证实了其良好的抗干扰特性以及长期稳定性.利用表面耗尽层模型解释了GaN/Ti

复合传感器气敏机理，及其与纯GaN传感器相比气敏性能提升的原因.最后，本文开发了一种无接触式TMA气体检测装置，检测结果表明该装置有望实现对肝、肾病患者呼出气的高效实时检测，在肝、肾疾病的早期筛查方面具有较大的应用潜力.

Abstract

In this paper

a new type of gallium nitride (GaN) /Ti

composite material was synthesized by solvothermal method and nitriding method

and the sensing characteristics of trimethylamine (TMA) gas sensor based on GaN/Ti

composite were studied. Through a series of characterization methods

the morphology and elemental composition of the composites were analyzed

and the successful composite of GaN and Ti

was confirmed. The results show that GaN/Ti

sensor can efficiently detect 1~200 ppm TMA gas at room temperature

and the detection limit of TMA is reduced from 10 ppm to 1 ppm compared with pure GaN sensor. In addition

the gas sensing results of the composite sensor further confirm its good anti-interference characteristics and long-term stability. The gas-sensitive mechanism of GaN/Ti

composite sensor and the reason of its improved gas-sensitive performance compared with pure GaN sensor are explained by using the surface depletion layer model. Finally

a contactless TMA gas detection device was developed in this paper

d the test results show that the device is expected to achieve efficient real-time detection of exhaled air in patients with liver and kidney disease

and has great application potential in early screening of liver and kidney diseases.

关键词

Keywords

references

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