栅压可调谐的本征SnO2乙醇传感器
增强出版Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO2
- 电子学报 2025年53卷第3期 页码：811-820
- 作者机构：
西安理工大学自动化与信息工程学院，陕西西安 710048
- 作者简介：
[ "吴海洋 女，1991年8月出生于陕西商洛.现为西安理工大学自动化与信息工程学院博士后.主要研究方向为低维半导体气体传感器. E-mail: haiyangwu@xaut.edu.cn" ]
[ "余宁梅 女，1963年1月出生于江苏南京.现为西安理工大学自动化与信息工程学院教授、博士生导师.主要研究方向为大规模集成电路设计及工艺.中国电子学会会员编号：E190010289S. E-mail: yunm@xaut.edu.cn" ]
- 基金信息：国家自然科学基金(62404179);陕西省教育厅专项科研计划项目(23JK0568);陕西省自然科学基础研究计划项目(2024JC-YBQN-0667)
DOI：10.12263/DZXB.20240624
中图分类号： TP212;收稿：2024-07-02，
修回：2024-12-27，
纸质出版：2025-03-25
- 稿件说明：
移动端阅览
吴海洋, 余宁梅. 栅压可调谐的本征SnO2乙醇传感器[J]. 电子学报, 2025, 53(03): 811-820.
WU Hai-yang, YU Ning-mei. Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO2[J]. Acta Electronica Sinica, 2025, 53(03): 811-820.
吴海洋, 余宁梅. 栅压可调谐的本征SnO2乙醇传感器[J]. 电子学报, 2025, 53(03): 811-820. DOI：10.12263/DZXB.20240624
WU Hai-yang, YU Ning-mei. Gate Voltage Tunable Ethanol Sensor Based on Pristine SnO2[J]. Acta Electronica Sinica, 2025, 53(03): 811-820. DOI：10.12263/DZXB.20240624
摘要
乙醇蒸汽因易挥发和易燃性可能会带来安全隐患，对其进行实时监测至关重要.然而，目前改善SnO
2
乙醇传感器性能的方法往往不利于器件的小型化.为此，论文设计了一种具有场效应管结构的本征SnO
2
乙醇传感器，采用磁控溅射法制备了敏感膜，系统研究了栅压对传感器气敏性能的调控作用.实验结果表明，溅射法制备的SnO
2
传感器为
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1.60866666
沟道耗尽型器件.气敏测试显示，在不同工作栅压下，传感器的响应存在显著差异：当栅压为10 V时，传感器在100 ppm乙醇中电流变化为2.40倍；而在-30 V栅压下，沟道电流变化显著增强至3.42倍，比10 V时提高了42%.进一步研究发现，SnO
2
的气敏特性来源于乙醇分子的表面吸附对沟道中载流子浓度的调制作用.这一效应在负栅压下显著增强，而在正栅压下被抑制.然而，10 V正栅压通过在沟道中诱导产生更多电子，有效加速了乙醇的吸附与解吸过程，使传感器对100 ppm乙醇的响应和恢复时间分别缩短至8 s和17 s，展现出更快的动态特性.论文研究结果表明，乙醇蒸汽在SnO
2
表面发生反应的程度和速率都受到传感器栅压的显著调控.该研究为优化SnO
2
传感器的气敏性能提供了新思路，有助于进一步推动其在微型化、快响应、高精度气敏检测领域的应用.
Abstract
It is crucial to monitor ethanol in real time due to the safety risks posed by its high volatility and flammability. However
current methods for improving the performance of SnO
2
ethanol sensors often hinder the miniaturization of devices. To address this
the paper designs an intrinsic SnO
2
ethanol sensor with a field-effect transistor structure and employs magnetron sputtering to fabricate the sensitive film. The study systematically investigates the influence of gate voltage on the gas-sensing performance of the sensor. Experimental results indicate that the SnO
2
sensor prepared by sputtering is an
n
-channel depletion-mode device. Gas-sensing tests reveal significant differences in the sensor’s response under different operating gate voltages: at a gate voltage of 10 V
the current change of the sensor in 100 ppm ethanol is 2.40 times; while at a gate voltage of -30 V
the channel current change is significantly enhanced to 3.42 times
representing a 42% improvement compared to 10 V. Further investigation shows that the gas-sensing properties of SnO
2
arise from the modulation of carrier concentration in the channel by the surface adsorption of ethanol molecules. This effect is significantly enhanced under negative gate voltage but suppressed under positive gate voltage. However
a positive gate voltage of 10 V induces more electrons in the channel
effectively accelerating the adsorption and desorption processes of ethanol. As a result
the sensor’s response and reco
very times to 100 ppm ethanol are reduced to 8 s and 17 s
respectively
demonstrating faster dynamic characteristics. The study’s findings indicate that the degree and rate of ethanol vapor reaction on the SnO
2
surface are significantly regulated by the sensor’s gate voltage. This research provides a new approach for optimizing the gas-sensing performance of SnO
2
sensors and contributes to advancing their application in miniaturized
fast-response
and high-precision gas-sensing detection.
关键词
Keywords
references
刘勃豪 , 谢光忠 , 段再华 , 等 . 一体化摩擦电自供能气湿传感器研究进展 [J ] . 电子学报 , 2024 , 52 ( 2 ): 660 - 677 .
LIU B H , XIE G Z , DUAN Z H , et al . Research progress on integrated triboelectric self-powered gas and humidity sensors [J ] . Acta Electronica Sinica , 2024 , 52 ( 2 ): 660 - 677 . (in Chinese)
ZHOU Y , DING Q J , LI J Y , et al . Enhanced sensing performance of TiO 2 /Ag 2 V 4 O 11 nanoheterostructures to ethanol gas [J ] . Journal of Alloys and Compounds , 2019 , 811 : 151958 .
SALIMI KUCHI P , ROSHAN H , SHEIKHI M H . A novel room temperature ethanol sensor based on PbS: SnS 2 nanocomposite with enhanced ethanol sensing properties [J ] . Journal of Alloys and Compounds , 2020 , 816 : 152666 .
GAI L Y , LAI R P , DONG X H , et al . Recent advances in ethanol gas sensors based on metal oxide semiconductor heterojunctions [J ] . Rare Metals , 2022 , 41 ( 6 ): 1818 - 1842 .
CAI Z C , GOO E , PARK S . Synthesis of tin dioxide (SnO 2 ) hollow nanospheres and its ethanol-sensing performance augmented by gold nanoparticle decoration [J ] . Journal of Alloys and Compounds , 2021 , 883 : 160868 .
TIAN X , HU Z X , JIA C , et al . A review of advanced gas sensor based on sputtering SnO 2 thin film: Challenges and opportunities [J ] . Journal of Environmental Chemical Engineering , 2023 , 11 ( 6 ): 111516 .
LIANG Y C , CHAO Y . Crystal phase content-dependent functionality of dual phase SnO 2 -WO 3 nanocomposite films via cosputtering crystal growth [J ] . RSC Advances , 2019 , 9 ( 12 ): 6482 - 6493 .
FANG J B , ZHU Y P , WU D J , et al . Gas sensing properties of NiO/SnO 2 heterojunction thin film [J ] . Sensors and Actuators B: Chemical , 2017 , 252 : 1163 - 1168 .
WANG Y , LIU C Y , WANG Z , et al . Sputtered SnO 2 : NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO 2 gas sensors [J ] . Sensors and Actuators B: Chemical , 2019 , 278 : 28 - 38 .
YANG C M , YANG Y C , CHEN C H . Thin-film light-addressable potentiometric sensor with SnOx as a photosensitive semiconductor [J ] . Vacuum , 2019 , 168 : 108809 .
AKGUL F A , GUMUS C , ER A O , et al . Structural and electronic properties of SnO 2 [J ] . Journal of Alloys and Compounds , 2013 , 579 : 50 - 56 .
MA D T , LI D Y , MI D H , et al . Robust SnO 2x nanoparticle-impregnated carbon nanofibers with outstanding electrochemical performance for advanced sodiumion batteries [J ] . Angewandte Chemie International Edition , 2018 , 57 ( 29 ): 8901 - 8905 .
SOPIHA K V , MALYI O I , PERSSON C , et al . Chemistry of oxygen ionosorption on SnO 2 surfaces [J ] . ACS Applied Materials & Interfaces , 2021 , 13 ( 28 ): 33664 - 33676 .
SINGH A K , JANOTTI A , SCHEFFLER M , et al . Sources of electrica l conductivity in SnO 2 [J ] . Physical Review Letters , 2008 , 101 ( 5 ): 055502 .
JI H C , ZENG W , LI Y Q . Gas sensing mechanisms of metal oxide semiconductors: A focus review [J ] . Nanoscale , 2019 , 11 ( 47 ): 22664 - 22684 .
ZHU X J , LI J F , CHANG X T , et al . Room temperature gas sensors for NH 3 detection based on SnO 2 films and lamellar-structured Ti 3 C 2 T x MXene heterojunction nanocomposites [J ] . Applied Surface Science , 2024 , 660 : 159976 .
BAI J Z , SHEN Y B , ZHAO S K , et al . Room-temperature NH 3 sensor based on SnO 2 quantum dots functionalized SnS 2 nanosheets [J ] . Advanced Materials Technologies , 2023 , 8 ( 8 ): 2201671 .
FENG Q X , HUANG B Y , LI X G . Graphene-based heterostructure composite sensing materials for detection of nitrogen-containing harmful gases [J ] . Advanced Functional Materials , 2021 , 31 ( 41 ): 2104058 .
CHEN Y , ZHANG W , WU Q S . A highly sensitive room-temperature sensing material for NH 3 : SnO 2 -nanorods coupled by rGO [J ] . Sensors and Actuators B: Chemical , 2017 , 242 : 1216 - 1226 .
CHOI S , BONYANI M , SUN G J , et al . Cr 2 O 3 nanoparticle-functionalized WO 3 nanorods for ethanol gas sensors [J ] . Applied Surface Science , 2018 , 432 : 241 - 249 .
CAO H T , HU Z X , WEI X Y , et al . Conductometric ethanol gas sensor based on a bilayer film consisting of SnO 2 film and SnO 2 /ZnSnO 3 porous film prepared by magnetron sputtering [J ] . Sensors and Actuators B: Chemical , 2023 , 382 : 133562 .
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