基于Pade近似的MEMS麦克风输出响应优化

毛鑫隆; 熊宇阳; 余建航; 李少平; 董旸; 姜岩峰

doi:10.12263/DZXB.20250163

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基于Pade近似的MEMS麦克风输出响应优化

学术论文 | 更新时间：2026-04-24

- 基于Pade近似的MEMS麦克风输出响应优化
- Output Response Optimization of MEMS Microphones Based on Pade Approximation
- 电子学报 2025年53卷第12期页码：4305-4316
- 作者机构：
  
  1.江南大学集成电路学院，江苏无锡 214122
  2.无锡华润微电子有限公司，江苏无锡 214061
- 作者简介：
  
  [ "毛鑫隆男，2000年出生于江苏省盐城市.2022年获得南京工程学院自动化学士学位，目前在江南大学集成电路学院攻读集成电路工程硕士学位.主要研究方向为数字集成电路设计.E-mail: 6231916042@stu.jiangnan.edu.cn" ]
  [ "熊宇阳男，2002年出生于河北省保定市.2024年获得长沙理工大学电子科学与技术学士学位，目前为江南大学物联网工程与技术学院博士研究生.主要研究方向为微机电系统（MEMS）、集成电路设计.E-mail: 7251923007@stu.jiangnan.edu.cn" ]
  [ "余建航男，1999年出生于安徽省合肥市.于2025年获得江南大学集成电路学院集成电路工程硕士学位.主要研究方向为集成电路设计.E-mail: 1776979279@163.com" ]
  [ "李少平男，1958年5月出生于湖北省武汉市.现为华润微电子有限公司新型半导体首席专家.主要研究方向为集成电路半导体芯片与先进MEMS传感器技术.E-mail: lishaoping15@crmicro.com" ]
  [ "董旸男，1988年10月出生于安徽省安庆市.现为华润微电子有限公司技术研究院高级工程师.主要研究方向为MEMS传感器产品结构.E-mail: dongyang36@crmicro.com" ]
  [ "姜岩峰男，1972年8月出生于吉林省吉林市.于1993年获得东南大学电气工程学士学位，2000年获得兰州大学微电子学博士学位，现任中国无锡江南大学教授.主要研究方向为微机电系统（MEMS）、集成电路设计、功率半导体器件和磁性器件.E-mail: jiangyf@jiangnan.edu.cn" ]
- 基金信息：
  
  国家重点研发计划(2024YFB4505403)
- DOI：10.12263/DZXB.20250163
  中图分类号： TN404;O241.8
- 收稿：2025-03-06，
  
  录用：2025-11-25，
  
  纸质出版：2025-12-25
- 稿件说明：
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毛鑫隆, 熊宇阳, 余建航, 等. 基于Pade近似的MEMS麦克风输出响应优化[J]. 电子学报, 2025, 53(12): 4305-4316.

MAO Xin-long, XIONG Yu-yang, YU Jian-hang, et al. Output Response Optimization of MEMS Microphones Based on Pade Approximation[J]. Acta Electronica Sinica, 2025, 53(12): 4305-4316.
毛鑫隆, 熊宇阳, 余建航, 等. 基于Pade近似的MEMS麦克风输出响应优化[J]. 电子学报, 2025, 53(12): 4305-4316. DOI：10.12263/DZXB.20250163

MAO Xin-long, XIONG Yu-yang, YU Jian-hang, et al. Output Response Optimization of MEMS Microphones Based on Pade Approximation[J]. Acta Electronica Sinica, 2025, 53(12): 4305-4316. DOI：10.12263/DZXB.20250163

摘要

为了改善电容式微机电系统（Micro-Electro-Mechanical Systems，MEMS）硅麦克风输出的非线性和温度漂移，本文在调研了相关传感器输出校准相关算法的基础上，提出了一种基于Pade近似的新型校准算法，具有较高实用性，已成功应用于国产高性能MEMS麦克风传感器中.该算法中，首先利用Pade近似对硅麦克风输出数据进行处理，以改善交叉灵敏度和跳跃点的影响；并利用一种精度拟合和线性回归的方法进行二次计算，以达到提高输出的校准精度的目的.在相对湿度50

的环境下，精度可以从6

FS提升到1.2

FS.与目前主流的相同精度的多项式拟合校准算法相比，本文使用的算法消耗的计算内存减少了约14%.该算法对于其他传感器或电路输出响应优化具有重大参考意义.

Abstract

In order to improve the nonlinearity and temperature drift of the output of the condenser micro-electro-mechanical systems (MEMS) silicon microphone

Based on the relevant algorithms of the current sensor output calibration strategies

and proposes a novel calibration algorithm based on the Pade approximation is proposed and testified

which is adopted in practical industrial application with high practicability. In a humidity environment with RH 50%

the accuracy of MEMS sensor can be improved from 6%FS to 1.2%FS. Compared with the current mainstream polynomial fitting calibration algorithm with the same accuracy

the algorithm used in the paper consumes about 14% less computational memory. The algorithm has great reference significance for the optimization of output response of other sensors or circuits.

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references

WASISTO H S , ANZINGER S , ACANFORA G , et al . Acoustically semitransparent nanofibrous meshes appraised by high signal-to-noise-ratio MEMS microphones [J ] . Communications Engineering , 2024 , 3 : 136 .

BAEK S H , PARK J , KIM D M , et al . Giant piezoelectricity on Si for hyperactive MEMS [J ] . Science , 2011 , 334 ( 6058 ): 958 - 961 .

党瑞荣 , 张宏伟 , 宋楠 , 等 . 高温高压井下压力传感器的补偿与校正 [J ] . 仪器仪表学报 , 2016 , 37 ( 4 ): 737 - 743 .

DANG R R , ZHANG H W , SONG N , et al . Compensation and calibration of the high temperature and pressure downhole pressure sensor [J ] . Chinese Journal of Scientific Instrument , 2016 , 37 ( 4 ): 737 - 743 . (in Chinese)

BALAVALAD K B , SHEEPARAMATTI B G . Design, simulation & analysis of SOI based micro piezoresistive pressure sensor for high temperature applications [C ] // 2018 3rd IEEE International Conference on Recent Trends in Electronics , Information & Communication Technology . Piscataway : IEEE , 2020 : 2163 - 2167 .

WANG J L , HU G Q , LI J , et al . Research on temperature compensation of piezo-resistive pressure sensor based on Newton interpolation and spline interpolation [C ] // 2021 IEEE 15th International Conference on Electronic Measurement & Instruments . Piscataway : IEEE , 2022 : 109 - 113 .

YU J B , LI J , DAI Q L , et al . Temperature compensation and data fusion based on a multifunctional gas detector [J ] . IEEE Transactions on Instrumentation and Measurement , 2015 , 64 ( 1 ): 204 - 211 .

CHAE C S , KWON J H , KIM Y H . A study of compensation for temporal and spatial physical temperature variation in total power radiometers [J ] . IEEE Sensors Journal , 2012 , 12 ( 6 ): 2306 - 2312 .

JO Y , LEE Y , KWON J , et al . 3D active-matrix multimodal sensor arrays for independent detection of pressure and temperature [J ] . Science Advances , 2025 , 11 ( 3 ): eads4516 .

SAMY I , POSTLETHWAITE I , GU D W . Unmanned air vehicle air data estimation using a matrix of pressure sensors: A comparison of neural networks and look-up tables [J ] . Proceedings of the Institution of Mechanical Engineers, Part G: Journal of Aerospace Engineering , 2011 , 225 ( 7 ): 807 - 820 .

RICHTER R . A spatially adaptive fast atmospheric correction algorithm [J ] . International Journal of Remote Sensing , 1996 , 17 ( 6 ): 1201 - 1214 .

WOLTERS R , KATEMAN G . The construction of simultaneous optimal experimental designs for several polynomials in the calibration of analytical methods [J ] . Journal of Chemometrics , 1990 , 4 ( 2 ): 171 - 185 .

BADURA M , BATOG P , DRZENIECKA-OSIADACZ A , et al . Regression methods in the calibration of low-cost sensors for ambient particulate matter measurements [J ] . SN Applied Sciences , 2019 , 1 ( 6 ): 622 .

HAN X G , ZHAO L B , WANG J H , et al . High-accuracy differential resonant pressure sensor with linear fitting method [J ] . Journal of Micromechanics and Microengineering , 2021 , 31 ( 4 ): 045006 .

GAYNULLIN B , HUMMELGÅRD C , MATTSSON C , et al . Advanced pressure compensation in high accuracy NDIR sensors for environmental studies [J ] . Sensors , 2023 , 23 ( 5 ): 2872 .

ZHOU G W , ZHAO Y L , GUO F F , et al . A smart high accuracy silicon piezoresistive pressure sensor temperature compensation system [J ] . Sensors , 2014 , 14 ( 7 ): 12174 - 12190 .

徐顺 , 卢文科 , 左锋 . 基于PSO-BP神经网络的光纤压力传感器温度补偿研究 [J ] . 仪表技术与传感器 , 2016 ( 10 ): 1 - 5 .

XU S , LU W K , ZUO F . Research on temperature compensation for optical fiber pressure sensor based on PSO-BP neural network [J ] . Instrument Technique and Sensor , 2016 ( 10 ): 1 - 5 . (in Chinese)

FUTANE N P , CHOWDHURY S R , CHOWDHURY C R , et al . ANN based CMOS ASIC design for improved temperature-drift compensation of piezoresistive micro-machined high resolution pressure sensor [J ] . Microelectronics Reliability , 2010 , 50 ( 2 ): 282 - 291 .

WANG H R , ZHANG W , YOU L D , et al . Back propagation neural network model for temperature and humidity compensation of a non dispersive infrared methane sensor [J ] . Instrumentation Science & Technology , 2013 , 41 ( 6 ): 608 - 618 .

马宏光 , 曾国辉 , 黄勃 . 基于WOA-BP的压力变送器温度补偿研究 [J ] . 仪表技术与传感器 , 2020 ( 6 ): 33 - 36 .

MA H G , ZENG G H , HUANG B . Research on temperature compensation of pressure transmitter based on WOA-BP [J ] . Instrument Technique and Sensor , 2020 ( 6 ): 33 - 36 . (in Chinese)

LI J , HU G Q , ZHOU Y H , et al . A temperature compensation method for piezo-resistive pressure sensor utilizing chaotic ions motion algorithm optimized hybrid kernel LSSVM [J ] . Sensors , 2016 , 16 ( 10 ): 1707 .

SINGH DHAKAD N , VISHVAKARMA S K . Configurable multiport memory architecture for high-speed data communication [J ] . IEEE Embedded Systems Letters , 2025 , 17 ( 3 ): 139 - 142 .

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