1. 东南大学国家专用集成电路系统工程技术研究中心,江苏,南京,210096
2. 华润上华半导体有限公司,江苏,无锡,214000
3. 东南大学国家专用集成电路系统工程技术研究中心,江苏,南京,210096
4. 华润上华半导体有限公司,江苏,无锡,214000
网络出版:2016-02-25,
纸质出版:2016
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刘斯扬, 于朝辉, 张春伟, 等. 不同栅压应力下1.8V pMOS热载流子退化机理研究[J]. 电子学报, 2016,44(2):348-352.
LIU Si-yang, YU Chao-hui, ZHANG Chun-wei, et al. Investigation on the Hot-Carrier-Induced Degradation for 1.8V pMOS Under Different Gate Voltage Stresses[J]. Acta Electronica Sinica, 2016, 44(2): 348-352.
刘斯扬, 于朝辉, 张春伟, 等. 不同栅压应力下1.8V pMOS热载流子退化机理研究[J]. 电子学报, 2016,44(2):348-352. DOI: 10.3969/j.issn.0372-2112.2016.02.015.
LIU Si-yang, YU Chao-hui, ZHANG Chun-wei, et al. Investigation on the Hot-Carrier-Induced Degradation for 1.8V pMOS Under Different Gate Voltage Stresses[J]. Acta Electronica Sinica, 2016, 44(2): 348-352. DOI: 10.3969/j.issn.0372-2112.2016.02.015.
本文详细研究了不同栅压应力下1.8V pMOS器件的热载流子退化机理.研究结果表明
随着栅压应力增加
电子注入机制逐渐转化为空穴注入机制
使得pMOS漏极饱和电流(I
dsat
)、漏极线性电流(I
dlin
)及阈值电压(
V
th
)等性能参数退化量逐渐增加
但在
V
gs
=90%*
V
ds
时
因为没有载流子注入栅氧层
使得退化趋势出现转折.此外
研究还发现
界面态位于耗尽区时对空穴迁移率的影响小于其位于非耗尽区时的影响
致使正向I
dsat
退化小于反向I
dsat
退化
然而
正反向I
dlin
退化却相同
这是因为I
dlin
状态下器件整个沟道区均处于非耗尽状态.
According to the experimental measurement results
combining with the technology computer aided design (TCAD) simulations
the hot-carrier degradations of 1.8V pMOS under different gate voltages are investigated in this paper.The results show that
with the gate voltage increasing
the electron injection mechanism changes to the hole injection mechanism
leading to the increases of the saturation drain current (I
dsat
)
linear drain current (I
dlin
) and threshold voltage (
V
th
).However
because there is not any carrier injection
the de
gradation trend begins to change at
V
gs
=90%*V
ds
.Moreover
the study also discovers that the generated interface states have more impact on the hole mobility in the depletion region than that in the non-depletion region.As a result
the degradation of forward I
dsat
is bigger than the degradation of reverse I
dsat
.However
the degradations of forward I
dlin
and reverse I
dlin
are same since the whole channel is not depleted under I
dlin
condition.
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