A CMOS temperature sensor with digital output is presented

and a new self-correcting technique is proposed to solve the problem of poor consistency and low yield caused by process variations.By applying the self-correcting technique

the change of the reference voltage in the temperature sensor kernel module is effectively suppressed and the consistency among chips is obviously improved.In this paper

the reference voltage module is simulated with different process corners.By comparing the maximum deviation of the reference voltages in the open and close states of the self-correcting module

the effectiveness of self-correcting technique is validated.The complete design is fabricated in the CSMCB5212 0.5 m CMOS process

providing an SPI digital interface with 10-bit output data.In the temperature range from -35℃ to 105℃

the inaccuracy of experiment results is merely 1℃

and the overall power consumption is less than 0.6mW.