A topography and volume measurement method is proposed to deal with the drawbacks of existing methods that they cannot simultaneously finish measuring the global and local morphologies of large-scale sample surface and volume calculation in a three-dimensional (3D) and high-resolution way.The large-scale scanning ion conductance microscopy (L-SICM) system was firstly built and the data stitching technique was used to extend the lateral measurement range of the existing SICM system

thus the large-scale

3D and high-resolution measurement result of the sample morphology can be obtained.Finally

digital image processing techniques such as subtracting background were utilized to accurately calculate the volume of the target object.Experimental results on sub-mm level sample indicate that the L-SICM based measurement method can effectively measure the global and local morphologies of large-scale sample in a 3D and high-resolution way and accomplish calculating the target volume and avoiding the nonlinear errors introduced by the optical measurement methods.Moreover

using smaller lateral scanning step (125 nm) can decrease the volumetric measurement error by 5.82% and the standard deviation of volume measurement by 38.12%

therefore improving the accuracy and stability of the measurement system.