1. 九江学院电子工程学院,江西,九江,332005
2. 中国科学院空天信息创新研究院,北京,100094
3. 西安电子科技大学物理与光电工程学院,陕西,西安,710071
4. 九江学院电子工程学院,江西,九江,332005
5. 中国科学院空天信息创新研究院,北京,100094
6. 西安电子科技大学物理与光电工程学院,陕西,西安,710071
网络出版:2020-11-25,
纸质出版:2020
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漆世锴, 王小霞, 王兴起, 等. 磁控管用新型直热式稀土铪酸钆陶瓷阴极研究[J]. 电子学报, 2020,48(11):2233-2241.
QI Shi-kai, WANG Xiao-xia, WANG Xing-qi, et al. A Novel Direct-Heated Rare-Earth Gd2Hf2O7 Ceramic Cathode Applied in Magnetron[J]. Acta Electronica Sinica, 2020, 48(11): 2233-2241.
漆世锴, 王小霞, 王兴起, 等. 磁控管用新型直热式稀土铪酸钆陶瓷阴极研究[J]. 电子学报, 2020,48(11):2233-2241. DOI: 10.3969/j.issn.0372-2112.2020.11.020.
QI Shi-kai, WANG Xiao-xia, WANG Xing-qi, et al. A Novel Direct-Heated Rare-Earth Gd2Hf2O7 Ceramic Cathode Applied in Magnetron[J]. Acta Electronica Sinica, 2020, 48(11): 2233-2241. DOI: 10.3969/j.issn.0372-2112.2020.11.020.
为了提高大功率磁控管的输出功率,延长其使用寿命,采用难熔稀土氧化钆和过渡金属氧化铪制备大功率磁控管用新型直热式稀土铪酸钆陶瓷阴极,并对该阴极的热发射特性和寿命特性等进行了测试,热发射测试结果显示该阴极在1300℃ br即可提供0.1A/cm
2
发射电流密度,1600℃ br下可提供超过1.93A/cm
2
的发射电流密度.寿命实验结果显示,该阴极在1500℃ br,直流负载为0.5A/cm
2
的条件下,寿命已经超过4000h.最后,利用X射线衍射仪、扫描电镜、能谱分析仪、氩离子深度刻蚀俄歇电镜等设备分别对该阴极活性物质的分子结构,阴极表面微观形貌、元素成分及含量等进行了分析.结果表明,高温烧结合成了单一的铪酸钆物相,烧结过程中当一种Gd
3+
价稀土氧化钆掺入Hf
4+
价的过渡金属氧化铪时,会发生离子置换固溶,为了保持铪酸钆晶格的电中性,晶格中就会产生一个氧空位.当阴极在激活、老练、热发射测试时,会加速氧空位的生成,产生的氧空位越多,阴极表面导电性就会越好,这间接降低了逸出功,从而提高了阴极的热发射能力.
In order to enhance the output power
prolong the lifetime of the high power magnetron
a method of refractory rare-earth oxide Gd
2
O
3
doped transition metal oxide HfO
2
was used to prepare direct-heated rare-earth Gd
2
Hf
2
O
7
ceramic cathode. The thermionic emission and life characteristics of the Gd
2
Hf
2
O
7
cathode had been measured. The results show that the cathode can provide
0.1A/cm
2
current density for the space charge limitation at 1300℃br
more than 1.93A/cm
2
at 1600℃br under 300V anode voltage. The lifetime for the cathode is more than 4000 h with an initial load of 0.5A/cm
2
at 1500℃br. Finally
the molecular structure
surface microstructure
element composition and content of the Gd
2
Hf
2
O
7
ceramic cathode had been analyzed by the XRD
SEM
EDS
AES (equipped with argon ion etching in-depth analysis) respectively. The analysis results show that the single Gd
2
Hf
2
O
7
phase has formed in the high sintering temperature. When the Gd
3+
valences Gd
2
O
3
doped the Hf
4+
valences HfO
2
the substitutional solid solution will be formed. In order to maintain the electrical neutrality of the Gd
2
Hf
2
O
7
lattice
an oxygen vacancy will be generated in the lattice. During the cathode activating
aging
and thermally testing
the oxygen vacancy will be generated fast. The more oxygen vacancies are obtained
the better the conductivity of the cathode surface has. Besides
the work function of the cathode can also be reduced due to the improvement of the electro-conductivity that enhances the thermionic emission capability of the cathode.
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