硅基亚波长光栅波导在微波光子学中的应用

doi:10.12263/DZXB.20220090

摘要/Abstract

摘要：

为了满足集成微波光子学的发展需要，随着硅基光子学的发展，硅基亚波长光栅波导被提出并受到关注.硅基亚波长光栅具备灵活度高、折射率可调等特性，主要用于实现光学滤波器、调制器、延迟线等集成微波光子学组件.本文对这类器件进行举例与讨论，并且在结尾提出对硅基亚波长光栅波导在集成微波光子学中应用的展望.

关键词: 硅基光子学, 亚波长光栅波导, 集成微波光子学, 滤波器, 调制器, 光学延迟线

Abstract:

In order to meet the increasing integration demand from integrated microwave photonics, the devices based on subwavelength grating waveguide is proposed and studied. The subwavelength grating waveguide is mainly used in filters and optical delay lines in integrated microwave photonics, with design freedom in refractive index. We review and discuss the developments of these applications, and provide the outlook on the application of the subwavelength grating waveguide devices in integrated microwave photonics at the end.

Key words: silicon photonics, subwavelength grating waveguide, integrated microwave photonics, filters, EO modulators, optical delay lines

中图分类号:

TN256

王俊嘉, 房崇宝, Chen Lawrence R. 硅基亚波长光栅波导在微波光子学中的应用[J]. 电子学报, 2022, 50(9): 2233-2241.

Jun-jia WANG, Chong-bao FANG, CHEN Lawrence R . Subwavelength Grating Waveguide for Microwave Photonic Applications[J]. Acta Electronica Sinica, 2022, 50(9): 2233-2241.

图/表 11

图1 集成微波光子系统示意图

图2 亚波长光栅原理图[43]

图3 亚波长光栅布拉格光栅图[11]

图4 基于包层调制亚波长光栅的复杂光谱滤波器[48]注:其中黑线代表对应的目标光谱

表1 亚波长布拉格光栅滤波器相关成果

Style	Q	Linewidth/pm	ER/dB
SWG Bragg1^[48]	$∼$ 7 000	210~340	7~11
SWG Bragg2^[49]	8 000	10.97	23
SWG Bragg3^[50]	11 800	—	—

表1 亚波长布拉格光栅滤波器相关成果

Style	Q	Linewidth/pm	ER/dB
SWG Bragg1^[48]	$∼$ 7 000	210~340	7~11
SWG Bragg2^[49]	8 000	10.97	23
SWG Bragg3^[50]	11 800	—	—

图5 亚波长光栅微环谐振腔和调制器[11]

表2 不同半径的亚波长光栅微环谐振腔

Ring radius/μm

FSR/nm

Average ER/dB

Average

Q-factor/dB

图6 梯形硅柱形成的不对称结构[52]

图7 电光聚合物渗透的高速调制器[53]

图8 集成光学真延迟线[30]

图9 基于亚波长光栅啁啾布拉格光栅做成的光学延迟线[55]

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