微波谐振式传感器研究进展

doi:10.12263/DZXB.20220124

电子学报 ›› 2022, Vol. 50 ›› Issue (10): 2530-2541.DOI: 10.12263/DZXB.20220124

微波谐振式传感器研究进展

赵文生, 方宇浩, 王大伟, 刘军

杭州电子科技大学电子信息学院，浙江省大规模集成电路设计重点实验室，浙江杭州 310018

收稿日期:2022-01-29 修回日期:2022-05-26 出版日期:2022-10-25
- 作者简介:
- 赵文生男，1986年出生，黑龙江铁力人.2008年在哈尔滨工业大学获学士学位，2013年在浙江大学获博士学位.现为杭州电子科技大学教授、博士生导师.主要研究方向为集成电路互连、三维集成、多物理场仿真、电子设计自动化、微波无源器件等.E-mail: wshzhao@hdu.edu.cn
  方宇浩男，2001年出生，浙江舟山人.杭州电子科技大学电子信息学院本科生.主要研究方向为微波传感器智能优化设计.E-mail: 19041507@hdu.edu.cn
  王大伟男，1988年出生，山东潍坊人.2010年在吉林大学获学士学位，2013年在中国电信技术研究院获硕士学位，2019年在浙江大学获博士学位.现为杭州电子科技大学副研究员、硕士生导师.主要研究方向为计算电磁学、多物理场模拟、微波器件设计等.E-mail: davidw.zoeq@hdu.edu.cn
  刘军男，1977年出生，浙江建德人.现为杭州电子科技大学教授、博士生导师.主要研究方向为集成电路EDA技术.E-mail: ljun77@hdu.edu.cn
- 基金资助:
- 国家自然科学基金 (61934006); 浙江省杰出青年基金 (LXR22F040001)

A Review on Microwave Resonant Sensors

ZHAO Wen-sheng, FANG Yu-hao, WANG Da-wei, LIU Jun

Zhejiang Provincial Key Laboratory of Large-Scale Integrated Circuit Design，School of Electronics and Information，Hangzhou Dianzi University，Hangzhou，Zhejiang 310018，China

Received:2022-01-29 Revised:2022-05-26 Online:2022-10-25 Published:2022-10-11

摘要/Abstract

摘要：

微波谐振式传感器具有低成本、高灵敏度、实时、无损检测等特点，在生物、医疗、环境等领域都有着广阔的应用前景.一般来说，微波谐振式传感器通过传输线激励谐振单元，通过谐振频率偏移等特征变化获得待测量.本文对微波谐振式传感器现有研究成果进行了详细的综述.首先简要介绍了微波谐振式传感器分类、基本工作原理及关键性能指标，其次以位移传感器、介质传感器及液体传感器这3种类型总结当前微波谐振式传感器国内外研究进展，之后着重探讨了群智能算法、机器学习等优化算法在微波谐振式传感器优化设计方面的应用，最后展望了微波谐振式传感器的发展前景以及存在的挑战.

关键词: 微波谐振式传感器, 传感机理, 材料表征, 群智能算法, 超材料谐振器

Abstract:

Microwave resonant sensors have the characteristics of low-cost, high-sensitivity, real-time and non-destructive detection. They have broad application prospects in various fields including biological, medical, and environmental. Generally speaking, microwave resonant sensor is composed of a resonant unit excited by transmission line. The quantity to be measured is obtained by the characteristic changes such as shift in resonant frequency. In this paper, the existing research of microwave resonant sensors are reviewed in detail. Firstly, the classification, basic operating principle, and key performance indicators of microwave resonant sensors are briefly introduced. Secondly, the current domestic and abroad research progresses of microwave resonant sensors are summarized in three types of sensors, i.e., displacement sensors, dielectric sensors, and liquid sensors. Then, the applications of optimization algorithms such as swarm intelligence algorithms and machine learning on the optimal design of microwave resonant sensors are emphatically explored. Finally, the future development prospects and existing challenges of microwave resonant sensors are discussed.

Key words: microwave resonant sensor, sensing mechanism, material characterization, swarm intelligence algorithm, metamaterial resonator

中图分类号:

TN61

赵文生, 方宇浩, 王大伟, 刘军. 微波谐振式传感器研究进展[J]. 电子学报, 2022, 50(10): 2530-2541.

ZHAO Wen-sheng, FANG Yu-hao, WANG Da-wei, LIU Jun. A Review on Microwave Resonant Sensors[J]. Acta Electronica Sinica, 2022, 50(10): 2530-2541.

图/表 10

图1 SRR耦合微波谐振式传感器示意图及其等效电路模型

图2 微波位移传感器及其测试曲线[22]

图3 介质传感器及其测试曲线[24]

图4 磁介质传感器[30]

图5 差分微流液体传感器及其测试曲线[44]

图6 基于群智能优化算法的微流通道自动优化设计方案

图7 群智能算法优化后的微波微流传感器及其测试曲线[55]

图8 DDPG框架图

图9 强化学习优化后的微波微流传感器及其测试曲线[58]

图10 微波谐振式实时非侵入式检测应用方案

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微波谐振式传感器研究进展

A Review on Microwave Resonant Sensors

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