
Si衬底上基于诱导成核技术的高质量GaN外延
许钪, 许晟瑞, 陶鸿昌, 苏华科, 高源, 杨赫, 安瑕, 黄俊, 张进成, 郝跃
电子学报 ›› 2024, Vol. 52 ›› Issue (12) : 3907-3913.
Si衬底上基于诱导成核技术的高质量GaN外延
High Quality GaN Epitaxy Based on Induced Nucleation Technology on Si Substrate
{{custom_ref.label}} |
{{custom_citation.content}}
{{custom_citation.annotation}}
|
/
〈 |
|
〉 |