电子学报

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基于肖特基势垒二极管的太赫兹固态倍频源和检测器研制

姚常飞1,2, 周明2, 罗运生2, 许从海2, 寇亚男2, 陈以钢2   

  1. 1. 南京电子器件研究所微波毫米波单片集成和模块电路重点实验室, 江苏南京 210016;
    2. 南京电子器件研究所微波毫米波模块电路事业部, 江苏南京 210016
  • 收稿日期:2012-03-26 修回日期:2012-05-13 出版日期:2013-03-25
    • 作者简介:
    • 姚常飞 男,1982年生于江苏常州,博士,工程师,现就职于南京电子器件研究所,在国内外期刊发表科研论文十余篇.研究方向为毫米波亚毫米波电路与系统. E-mail:yaocf1982@163.com;周 明 男,1974年生于江苏南京,高级工程师,现就职于南京电子器件研究所,研究方向为微波毫米波电路与系统.罗运生 男,1944年生于辽宁沈阳,研究员,现就职于南京电子器件研究所,研究方向为微波毫米波电路与系统.许从海 男,1981年生于江苏淮安,工程师,现就职于南京电子器件研究所,研究方向为微波毫米波多功能组件.寇亚男 女,1965年生于江苏南京,高级工程师,现就职于南京电子器件研究所,获中国电科科学技术二等奖2项、三等奖2项、国防科学技术三等奖1项,研究方向为微波毫米波电路多芯片微组装工艺.陈以钢 男,1959年生于江苏盐城,高级工程师,现就职于南京电子器件研究所,获原电子部科技进步一等奖、二等奖、三等奖各一项.研究方向为微波材料和器件.

Development of Terahertz Frequency Solid State Multiply Sources and Sensors with Schottky Barrier Diodes

YAO Chang-fei1,2, ZHOU Ming2, LUO Yun-sheng2, XU Cong-hai2, KOU Ya-nan2, CHEN Yi-gang2   

  1. 1. Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing, Jiangsu 210016, China;
    2. Department of Microwave and Millimeter Wave Modules, Nanjing Electronic Devices Institute, Nanjing, Jiangsu 210016, China
  • Received:2012-03-26 Revised:2012-05-13 Online:2013-03-25 Published:2013-03-25

摘要: 本文基于GaAs肖特基势垒二极管以及混合集成电路工艺,对太赫兹固态倍频和检测技术开展了研究.文章结合肖特基势垒二极管物理结构,采用电磁场仿真软件和电路仿真软件相结合的综合分析方法,对各模块电路进行优化设计,研制出了高倍频效率的倍频源和高灵敏度的检测器(检波器和谐波混频器).0.15THz检波器测得最高检波电压灵敏度1600mV/mW,在0.11~0.17THz灵敏度典型值为600mV/mW,切线灵敏度优于-29dBm.0.15THz二倍频器测得最高倍频效率7.5%,在0.1474~0.152THz效率典型值为6.0%.0.18THz二倍频器测得最高倍频效率14.8%,在0.15~0.2THz效率典型值为8.0%.0.15THz谐波混频器测得最低变频损耗10.7dB,在0.135~0.165THz变频损耗典型值为12.5dB.0.18THz谐波混频器测得最低变频损耗5.8dB,在0.165~0.2THz变频损耗典型值为13.5dB,在0.21~0.24THz变频损耗典型值为11.5dB.

关键词: 太赫兹, 倍频器, 检波器, 谐波混频器

Abstract: Terahertz solid state frequency multiplying sources and sensors are developed with GaAs Schottky barrier diodes and hybrid integrated circuit process.Based on physical structure of diode,high efficiency multipliers,and high sensitivity sensors,such as detectors and subharmonic mixers (SHM) are developed with the combination of electromagnetic (EM) full-wave tool and circuit simulation tool.To the 0.15THz detector,highest measured voltage sensitivity is 1600mV/mW,typical sensitivity is 600mV/mW in 0.11~0.17THz,and tangential signal sensitivity (TSS) is superior than -29dBm.To the 0.15THz frequency doubler,highest measured multiply efficiency is 7.5%,and typical efficiency is 6.0% in 0.1474~0.152THz.To the 0.18THz frequency doubler,highest measured multiply efficiency is 14.8%,and typical efficiency is 8.0% in 0.15~0.2THz.To the 0.15THz SHM,lowest measured conversion loss is 10.7dB,and typical conversion loss is 12.5dB in 0.135~0.165THz.To the 0.18THz SHM,lowest measured conversion loss is 5.8dB,and typical conversion loss is 13.5dB and 11.5dB in 0.165~0.2THz and 0.21~0.24THz,respectively.

Key words: terahertz, multiplier, detector, subharmonic mixer (SHM)

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