[1] Wang Yucai,Chodavarapu Vamsy P.Design of a CMOS readout circuit for wide-temperature range capacitive MEMS sensors[A].15th Int'l Symposium on Quality Electronic Design[C].Santa,CA,USA,2014.738-742.
[2] Laine J,Mougenot D.Benefits of MEMS based seismic accelerometers for oil exploration[A].Solid-State Sensors,Actuators and Microsystems Conference[C].Lyon,France,2007.1473-1477.
[3] Pastre M,Kayal M,Schmid H,et al.A 300Hz 19b DR capacitive accelerometer based on a versatile front end in a 5th-order delta sigma loop[A].Proceedings of the 35th European Solid-State Circuits Conference (ESSCIRC'09) [C].Athens,Greece,2009.288-291.
[4] Schmid H,Sigel S,Pastre M,et al.An internally non-linear ADC for a sigma delta accelerometer loop[A].International Symposium on Circuits and Systems Nano-Bio Circuit Fabrics and Systems[C].Paris,France,2010.2155-2158.
[5] Saxena G D,Thamarai V.Modeling and Simulation of High Performance Sixth Order Sigma-Delta MEMS Accelerometer[A].International Conference on Computational Intelligence and Communication Systems [C].IEEE,2011.527-531.
[6] Honglin Xu,Xiaowei Liu,Qiang Fu,et al.A high-order closed-loop ΣΔ interface for micro-machined accelerometer sensor[J].Analog Integrated Circuits and Signal Processing,2015,82(2):401-410.
[7] Petkov Vladimir P,Boser Bernhard E.A fourth-order sigma delta interface for micromachined inertial sensors[J].IEEE Journal of Solid-State Circuits,2005,40(8):1602-1609.
[8] Gaisser A,Geiger W,Link T,et al.New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes [J].Sensors and Actuators A,2002,97-98: 557-562.
[9] Reinhard Neul,Udo-Martin Gmez,Kersten Kehr,et al.Micromachined angular rate sensors for automotive applications[J].IEEE Sensors Journal,2007,7(2): 302-309.
[10] Fang Chen,Weizheng Yuan,Honglong Chang,et al.Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator[A].2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) [C].IEEE,2014.761-764.
[11] Zwahlen P,Nguyen A M,Dong Y F,et al.Navigation grade MEMS accelerometer[A].23rd IEEE International Conference on Micro Electro Mechanical Systems[C].IEEE,2010.631-634.
[12] Robert G Walmsley,Palo Alto.Three phase capacitance-based sensing[P].US: 8661901B2,2014-03-04.
[13] Z Zhang,G C Temes.Multibit oversampled Σ-Δ A/D convertor with nonuniform quantization[J].Electronics Letters,1991,27(6): 528-529.
[14] Bingxin Li,Tenbunen H.Sigma delta modulators using semi-uniform quantizers[A].Circuits and Systems,ISCAS[C].IEEE,2001.I456-I459.
[15] Bingxin Li,Tenhunen H.A second order sigma delta modulator using semi-uniform quantizer with 81dB dynamic range at 32x OSR[A].Solid-State Circuits Conference(ESSCIRC)[C].Firenze,Italy,2002.579-582.
[16] O'Donnell R.Circuit techniques for reducing the effects of op-amp imperfections: Autozeroing,correlated double sampling,and chopper stabilization[J].Proceedings of the IEEE,1996,84(11):1582-1583.
[17] Payandehnia P,Maghami H,Meng Xin,et al.Sequential interstage correlated double sampling: A switched-capacitor technique for high accuracy systems[A].2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS) [C].IEEE,2014.262-265.
[18] Yun Weijie.A surface micromachined accelerometer with integrated cmos detection circuitry[D].University of California,Berkeley,1992.
[19] Biter Boga,Ilker Ender Ocak,Haluk Kulah,et al.Modeling of a capacitive Σ-Δ MEMS accelerometer system including the noise components and verification with test results[A].22nd International Conference on Micro Electro Mechanical Systems (MEMS) [C].2009.821-824.
[20] Gabrielson T B.Mechanical-thermal noise in micromachined acoustic and vibration sensors[J].IEEE Transactions on Electron Devices,1993,40(5): 903-909.
[21] Boser B E,Howe B T.Surface micromachined accelerometers[A].IEEE 1995 Custom Integrated Circuits Conference[C].IEEE,1995.337-344.
[22] Haluk Kulah,Junseok Chae,Khalil Najafi.Noise analysis and characterization of a sigma-delta capacitive silicon microaccelerometer[A].12th International Conference on Solid-State Sensors,Actuators and Microsystems (Transducers03) [C].Boston,USA,2003.95-98.
[23] Haluk Kulah,Junseok Chae,Khalil Najafi.Noise analysis and characterization of a sigma-delta capacitive microaccelerometer[J].IEEE Journal of Solid-State Circuits,2006,41(2):352-361. |